Dr. András E. Vladár is the leader of Scanning Electron Microscope Metrology Project at the Nano–Scale Metrology Group of the National Institute of Standards and Technology. He holds M.S. (1977) and Ph.D. (1984) degrees in Electrical Engineering from the Technical University of Budapest, Hungary. Until 1991 he worked as a Research Fellow at the Research Institute for Technical Physics of the Hungarian Academy of Sciences, Budapest.  Dr. Vladár is an expert in scanning electron microscope (SEM) critical dimension (CD) metrology; he has developed several metrology systems based on SEMs. Prior to joining NIST in 1999, he was a member of the technical staff of Hewlett–Packard ULSI Research Laboratory and primarily worked on accurate, fast and effective dimensional measurement methods for 100 nm silicon integrated circuit technology. At Hewlett–Packard he established sound metrology methods, procedures and practices that significantly improved the speed and quality of dimensional measurements, surface inspection and film thickness measurements in the Class 1 integrated circuit fabrication facility. He identified the main sources of measurement errors and developed several successful methods to eliminate many of them.

Dr. Vladár is the member and key contributor to the work of the Advanced Metrology Advisory Group of International SEMATECH (ISMT). This group is the only body of experts in the world that deals with the special issues of dimensional metrology for the leading integrated circuit manufacturing. Dr. Vladár had been instrumental in the development of new methods to deduce the shape of integrated circuit structures from top–down view images through modeling and library–based measurement techniques. Several researchers and CD–SEM tool manufacturers are now implementing this idea. He has advocated the need for the development of a document that can foster the faster development of better SEMs, and especially the so–called critical dimension CD–SEMs. He has also played an important role in the development of standardized metrology procedures for the semiconductor community as a whole through authoring multiple sections in the measurement guidelines described in the Unified Advanced CD–SEM Specification published by ISMT.

Dr. Vladár as the leader of the SEM Metrology Project is the scientific manager for the development and renewal effort of the metrology SEM. This specialized tool is currently undergoing major improvements in hardware and measurement control software. Additionally, for standard calibration purposes, a new scanning electron microscope-based, best-in-the-world dimensional measurement system is being designed. This instrument is planned to be used in the NIST Advanced Measurement Laboratory (AML).

Bea Sennewald's Senior Vice President of HDR Architecture and HDR’s principal in London. She joined HDR in 1983. Her work has focused on research, high technology and industrial applications. She has designed over six million square feet of space for corporate, academic and government research facilities, including physical sciences, computer sciences, communications, biology, materials science, microelectronics, and toxicology. She is an expert at specialized requirements, including clean room technology, temperature and vibration control and electromagnetic shielding.

Ms. Sennewald was a contributing author for the Handbook of Laboratory Design, has published frequently in Architecture, Architectural Technology, Specifications, and R&D. She is a regular speaker at conferences.

She was also an advisor to the National Institutes of Health for laboratory design standards.

She was the design director for the Advanced Measurement Laboratories for NIST in Gaithersburg and Boulder. Her recent work includes projects in England, France, Germany and the Netherlands.

Ms Sennewald received a Master of Architecture degree (magna cum laude) from the University of Oregon.

Bob has over 40 years experience in making sensitive measurements and managing related projects, mainly at Keithley Instruments, the leading manufacturer of very sensitive electronic measuring instruments. He has designed the most sensitive Ammeter and Voltmeter commercially available, advised many scientists on difficult measurement problems and worked with Scientists and Architects to design nanotechnology buildings.

Dr. Teague is Chief of the Manufacturing Metrology Division in the Manufacturing Engineering Laboratory of the National Institute of Standards and Technology.

At NIST since 1972, Dr. Teague has designed, constructed, and used precision instrumentation for ultra-high accuracy dimensional metrology of surfaces and micrometer to nanometer-scale features. Beginning with his metal-vacuum-metal tunneling work in the 1970's, he continued to work with such precision instrumentation as scanning tunneling microscopes, atomic force microscopes, displacement and phase-measuring interferometry, stylus instruments, flexure stages, and light scattering apparatus. Because the laboratory and building environments were always factors in the ultimate performance of these instruments, the subject of this workshop has been an ongoing topic of great interest.

Dr. Teague is a member of the American Society for Precision Engineering, has served twice as the Society's President, and is a fellow of the UK Institute of Physics. He served as Editor-in-Chief of the international journal Nanotechnology for ten years and is currently a member of the Editorial Board of the journal. He holds a B.S. and M.S. in physics from the Georgia Institute of Technology and a PhD in physics from the University of North Texas. He has authored or coauthored 70 papers, has presented 50 invited talks in the technical fields described, and jointly with colleagues, has six patents. Dr. Teague has received the Gold Medal, Silver Medal, and Allen V. Astin Measurement Science Award from the Department of Commerce, the Kilby International Award by the Kilby Awards Foundation, and an IR-100 Industrial Research and Development Award for his work.

Mr. Bechtol is a Senior Vice President and a Professional Associate of HDR and the Electrical Section Manager. He has over 23 year of experience in the planning and design of lighting, power and communication systems for laboratory, institutional, health care and justice facilities.

Mr. Bechtol has designed laboratory electrical systems for the Department of Defense and the Food and Drug Administration. His university laboratory experience includes Johns Hopkins, Duke, UNC and UVA. At the National Institute of Standards and Technology (NIST) Advanced Measurement Laboratory, Mr. Bechtol developed a power distribution system to provide two sources of clean isolated power to each lab to reduce the effects of power disturbances from adjacent labs and from building equipment including lights, elevators and mechanical equipment. He is currently the lead electrical engineer for the Purdue University Birck Nanotechnology Center.

Mr. Bechtol received a Bachelor of Architectural Engineering degree from Penn State in 1979. In 1984, he received his Professional Engineer's license. He is a member of the Illuminating Engineering Society (IES) and the International Association of Electrical Inspectors.

After receiving his BSME degree from Washington University in St. Louis, Dr. Ungar worked for three hears on development of second-generation atomic weapons at Sandia Corporation in Albuquerque, NM. There he also attended the University of New Mexico, from where he received his MS degree. Subsequently, he served as instructor in mechanical engineering at New York University while he pursued his doctoral studies. He was awarded the degree of Doctor of Engineering Science from NYU in 1957 and then was appointed assistant professor. In 1959 he joined the renowned research and consulting firm of Bolt Beranek and Newman, Inc., in Cambridge, MA, where he held several technical and management positions until his retirement from there in 1996 as Chief Consulting Engineer. Since then he has been serving as Chief Engineering Scientist at Acentech Incorporated in Cambridge, MA.

Dr. Ungar is a Fellow of the Acoustical Society of America and served as that society’s President in 1992-93. He is a Life Fellow of the American Society of Mechanical Engineers and held the chairmanship of its Design Engineering Division in 1978-79. He is a board-certified member of the Institute of Noise Control Engineering, whose presidency he held in 1985, and he is an Associate Fellow of the American Institute for Aeronautics and Astronautics.
In addition to having published well over 200 technical papers and more than a dozen chapters in handbooks and monographs, Dr. Ungar has translated and revised the book “Structure-Borne Sound”, which is considered as a classic in its field. He has chaired highly regarded short courses on Vibration Control at the Pennsylvania State University for more than twenty years and has lectured in these and numerous other courses in the US, Sweden, France, Brazil, and Australia.
The American Society of Mechanical Engineers awarded him its Per Bruel Gold Medal “for fundamental contributions to noise and vibration control engineering involving structural damping, vibration isolation, and vibrations of complex structures, as applied to aerospace vehicles, ships, machines, and buildings.” The Acoustical Society of America honored him with its Trent-Crede medal “for his important contributions to our understanding of vibrations in complex structures, the effects of structural damping, and the propagation of structure-borne sound.”

Dr. Ungar has consulted on vibrations of numerous high-technology facilities, including nano-mechanics and microbiology laboratories and installations for advanced, optics, and astronomy research. He also has served as consultant on facilities that require high resistance to vibration-related damage or malfunction, including the President’s helicopter hangar and various aircraft test cells. He has pioneered in the development of what has become the standard method for predicting footfall-induced vibrations in buildings that house sensitive devices and has consulted on vibration isolation of instruments, machinery, and entire buildings.

Mr. Amick received a Bachelor of Science in Civil and Architectural Engineering from the University of Wyoming in Laramie, Wyoming, a Master of Science. in Structural Engineering at the University of California, Berkeley, California and a Master of .Engineering. In Civil Engineering from the University of California in Berkeley, California. Mr. Amick works on problems related to structural and soil dynamics, rail and transportation vibrations, mechanical vibrations, and community or workplace vibrations. He is experienced in signals processing, finite element modeling and many aspects of structural and soil dynamics. Hal Amick has worked extensively in the design of low vibration environments for advanced technology facilities.

Hal Amick joined Colin Gordon & Associates in 1996, after spending eleven years with Bolt Beranek & Newman and Acentech. Prior to 1990, he worked closely with Colin Gordon at BBN. At Colin Gordon & Associates he focuses on the design and maintenance of low-vibration environments for vibration-sensitive facilities used for research, development and production of microelectronics as well as those used for nanotechnology, optics research, advanced physics and bioscience studies. His early consulting work involved a wide variety of structural settings, including nuclear power plant seismic analysis, container crane design, and structural failure analysis. Since 1993 he has served as vibration consultant for design and renovation of laboratories at the National Institute of Standards and Technology (NIST). Mr. Amick’s selected project experience includes: Advanced Measurement Laboratory (NIST); M. D. Anderson Cancer Research Center; Genentech Hall (Building 24), University of California, San Francisco, Mission Bay Campus;Knudsen Hall West, UCLA; Huntsman Cancer Research Center, University of Utah; California Nano Systems Institute, University of California at Santa Barbara; Birck Nanotechnology Research Center, Purdue University; P-050 Nano Science Research Laboratory, Naval Research Laboratory; and Seagate Research Center.

Hal Amick has written and presented many papers and reports, and has published extensively.

Dr. James S. Murday received a Bachelor of Science in Physics from Case Western Reserve in 1964, and a Ph.D. in Solid State Physics from Cornell in 1970. He joined the Naval Research Laboratory (NRL) in 1970, led the Surface Chemistry effort from 1975-1987, and has been Superintendent of its Chemistry Division since 1988. From May to August 1997 he served as Acting Director of Research for the Department of Defense, Research and Engineering. He is a member of the American Physical Society, the American Chemical Society and the Materials Research Society; and a fellow of the American Vacuum Society (AVS), and the UK Institute of Physics. For the AVS, he has served as trustee for 1981-1984, director for 1986-1988, representative to the American Institute of Physics Governing Board 1986-1992, president for 1991-93, and representative to the Federation of Materials Societies 1998-present.

His research interest in nanoscience began in 1983 as an Office of Naval Research program officer and continues through the NRL Nanoscience Institute. He has organized numerous International STM/NANO conferences and their proceedings. Under his direction, both the AVS and the International Union for Vacuum Science, Technology and Applications created a Nanometer Science/Technology Division. He is Executive Secretary to the U.S. National Science and Technology Council's Subcommittee on Nanoscale Science Engineering and Technology (NSET) and Director of the National Nanotechnology Coordinating Office.

Since February of 2002, Jeffrey W. Roblee has been with Precitech of Keene, New Hampshire where he holds the position of Vice President of Engineering. Precitech is a world leader in the design and manufacture of ultra precision machine and metrology systems.

From 1977 to 1990, Dr. Roblee held research positions at Lawrence Livermore National Laboratory in California. There he developed ultra-precision machine tools and measuring instruments for use in optics fabrication. As part of this work, he was involved in numerous facilities development for these devices. His research work led to a 14 month assignment at Phillips Research Laboratory in The Netherlands in 1986 and then to a research position at Carl Zeiss in Oberkochen, Germany in 1990. As a member of the Optical Process Development Laboratory, he led four projects that improved the fabrication time, precision and finish of optical components by more than a factor of two.

In late 1993 he joined the Optical Engineering Department at Polaroid Corporation in Cambridge, Massachussetts. At Polaroid, Dr. Roblee led a program to develop a laser print head for use in making medical images and other purposes. In 1997 he received Polaroid’s title of Distinguished Engineer and the Engineering Excellence Award from the Optical Society of America in recognition of his work on improving optical fabrication processes. Dr. Roblee was named Technical Director in 1998 with responsibility for three departments in Polaroid R&D: Model Shops, CAD Technology Center and Concept Engineering. In early 2001 he was chosen to lead the Optical Engineering Department as well.

Dr. Roblee holds a number of patents and has written numerous papers on temperature control, machine dynamics, air bearing design, optics fabrication and opto-mechanics. He is currently a member of the American Society of Precision Engineering. Jeffrey W. Roblee has a M.S. and Ph.D., both in mechanical engineering, from the University of California at Berkeley, 1979 and 1985. His B.S.M.E. is from the University of Arkansas, 1978.

Dr. Lawall came to NIST as an NRC postdoctoral fellow in the Laser Cooling and Trapping group in 1995.  Since 1997 he has been a staff member in the Quantum Metrology Group.  His current research work involves ultra-high accuracy laser interferometry with stabilized CW lasers, and frequency combs using mode-locked femtosecond lasers.

Dr. Lawall received his B.S. degree in physics from Stanford University and his PhD in experimental atomic physics from Harvard University.  Prior to starting his PhD work, he spent two years as a Peace Corps volunteer in Mali, where he taught mathematics at the Lycée de Segou and constructed energy-efficient wood stoves.  Following his doctoral degree, he was a Chateaubriand postdoctoral fellow in Paris at the Ecole Normale Superieure, where he was instrumental in laser cooling a three-dimensional gas of atoms to 180 nanoKelvin, the record temperature at that time.

In his spare time Dr. Lawall plays the violin and viola in chamber ensembles and enjoys whitewater kayaking.