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Buildings for Advanced Technology Workshop
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  Workshop Speakers
   
 

Ahmad Soueid

Ahmad Soueid
HDR Architecture, Inc.

ahmad.soueid@hdrinc.com

 
HDR Architecture, Inc.
Principal, Senior Vice President


Ahmad Soueid is a Principal / Senior Vice President of HDR Architecture, Inc. He joined HDR over twelve years ago as a registered architect after working for architectural firms in New York, Connecticut and Texas. He focuses exclusively on the design and construction of advanced technology facilities for both private and public sector clients.

Ahmad Soueid is a registered architect that offers creative solutions to technically challenging nanotechnology facilities. Mr. Soueid is a leader in the design of nanotechnology facilities and he serves as a hands-on Principal for a prestigious list of nanotechnology projects such as the NIST Advanced Measurement Laboratory, a 511,070 square feet $175M state-of-the-art laboratory; Purdue University's $47M Birck Nanotechnology Center as well as Brookhaven National Laboratory's $28M Center for Functional Nanomaterials.

Mr. Soueid also consulted as a nanotechnology facilities advisor to Mexico's Centro Nacional de Metrología as well as the U.K.'s National Physical Laboratory. Mr. Soueid was co-chairman of the Buildings for Advanced Technology Workshop (January 2003) organized in part under the National Nanotechnology Initiative (NNI) in conjunction with NIST and the Naval Research Laboratory (NRL) as well as the Buildings for Advanced Technology Workshop II (January 2004), sponsored by Arizona State University.

Mr. Soueid's is a frequent speaker at technical conferences. Mr. Soueid's presentation on the "Technical Challenges of designing Bio-Nano spaces in a Cleanroom environment" was a featured case study at a recent Tradeline Conference on Nanotechnology facilities. Other presentations include a variety of topics, including "High Accuracy Temperature Control in Metrology Laboratories" at the Quality Manufacturing 2000 Conference in Birmingham, United Kingdom, and a presentation at the "New Trends in Metrology Workshop" the National Physical Laboratory in Teddington, United Kingdom as well as "A Case Study for Designing for Nanotechnology" to the Ottawa Valley Chapter of ASHRAE in Canada.

Mr. Soueid graduated from the University of Texas at Arlington where he received both a Bachelor of Science in Architecture and a Master of Architecture degree.

Presentations

 Buildings for Advanced Technology
As Nanotechnology research compels the scientific world to explore new uncharted territories, scientists are increasingly demanding more stable research environments. Scientists are manipulating matter at the atomic and molecular scales in order to obtain materials and systems with significantly improved properties. This level of research imposes more strenuous demands on the physical environment. These demands include high levels of accuracy in temperature and humidity control, vibration and acoustic isolation, air cleanliness (from particulate and/or biological contaminates), EMI and RFI shielding as well as the need for good quality electrical power. Once dubbed state-of-the-art, laboratory facilities are becoming obsolete to accommodate future research. Scientists are finding themselves spending time working on improving the physical environment and diverting valuable resources away from research. The most economical fix is to introduce self-contained mini environments that improve the environmental characteristics around the experiment, however conflicting environmental criteria are demanding increasingly complex infrastructures. Many institutions are realizing the need for designing and constructing new facilities with criteria that is more and more restrictive. This presentation elaborates on advanced technology facilities and provides a quick overview of international facilities that are either in design, under construction or recently completed.

 
 NIST Advanced Measurement Laboratory Site Overview
 Systems Integration and Competing Criteria
Ahmad Soueid, Dave Bechtol, Hal Amick
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Andras Vladar


Andras Vladar
National Institute of Standards and Technologies

andras.vladar@nist.gov

 
National Institute of Standards and Technology
 SEM Project Leader, Nanometer-Scale Metrology Group


Dr. András E. Vladár is the leader of Scanning Electron Microscope Metrology Project at the Nano–Scale Metrology Group of the National Institute of Standards and Technology. He holds M.S. (1977) and Ph.D. (1984) degrees in Electrical Engineering from the Technical University of Budapest, Hungary. Until 1991 he worked as a Research Fellow at the Research Institute for Technical Physics of the Hungarian Academy of Sciences, Budapest.  Dr. Vladár is an expert in scanning electron microscope (SEM) critical dimension (CD) metrology; he has developed several metrology systems based on SEMs. Prior to joining NIST in 1999, he was a member of the technical staff of Hewlett–Packard ULSI Research Laboratory and primarily worked on accurate, fast and effective dimensional measurement methods for 100 nm silicon integrated circuit technology. At Hewlett–Packard he established sound metrology methods, procedures and practices that significantly improved the speed and quality of dimensional measurements, surface inspection and film thickness measurements in the Class 1 integrated circuit fabrication facility. He identified the main sources of measurement errors and developed several successful methods to eliminate many of them.

Dr. Vladár is the member and key contributor to the work of the Advanced Metrology Advisory Group of International SEMATECH (ISMT). This group is the only body of experts in the world that deals with the special issues of dimensional metrology for the leading integrated circuit manufacturing. Dr. Vladár had been instrumental in the development of new methods to deduce the shape of integrated circuit structures from top–down view images through modeling and library–based measurement techniques. Several researchers and CD–SEM tool manufacturers are now implementing this idea. He has advocated the need for the development of a document that can foster the faster development of better SEMs, and especially the so–called critical dimension CD–SEMs. He has also played an important role in the development of standardized metrology procedures for the semiconductor community as a whole through authoring multiple sections in the measurement guidelines described in the Unified Advanced CD–SEM Specification published by ISMT.

Dr. Vladár as the leader of the SEM Metrology Project is the scientific manager for the development and renewal effort of the metrology SEM. This specialized tool is currently undergoing major improvements in hardware and measurement control software. Additionally, for standard calibration purposes, a new scanning electron microscope-based, best-in-the-world dimensional measurement system is being designed. This instrument is planned to be used in the NIST Advanced Measurement Laboratory (AML).

 
Presentation
 Scanning Electron Microscopy in Real-World Environments

Electron microscopes are working close to atomic levels and it is expected that they are going to be key imaging and metrology tools in the upcoming nanotechnology. Almost all scanning electron microscopes are limited in their operation by their environment. Usually it is possible to achieve significantly better performance than the specification of these tools by the proper design of their environment and by the use of supplementary compensatory methods. Vibrations transmitted by the building, air (sound) and water and gas supply have obvious detrimental effects to image and measurement quality of these instruments. Low and high frequency electromagnetic fields interfere with the electronics of the microscope and also with the electrons used in the signal generation and detection. This presentation will present detailed specifications and requirements for the environment of SEMs; and will show examples for the various negative effects of the environment, and some possible methods useful to minimize them.

 
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Bea Sennewald
AIA, HDR


Bea Sennewald
HDR Architecture, Inc.

bsennewa@hdrinc.com

 
HDR Architecture, Inc.
Senior Vice President/Principal


Bea Sennewald's Senior Vice President of HDR Architecture and HDR’s principal in London. She joined HDR in 1983. Her work has focused on research, high technology and industrial applications. She has designed over six million square feet of space for corporate, academic and government research facilities, including physical sciences, computer sciences, communications, biology, materials science, microelectronics, and toxicology. She is an expert at specialized requirements, including clean room technology, temperature and vibration control and electromagnetic shielding.

Ms. Sennewald was a contributing author for the Handbook of Laboratory Design, has published frequently in Architecture, Architectural Technology, Specifications, and R&D. She is a regular speaker at conferences.

She was also an advisor to the National Institutes of Health for laboratory design standards.

She was the design director for the Advanced Measurement Laboratories for NIST in Gaithersburg and Boulder. Her recent work includes projects in England, France, Germany and the Netherlands.

Ms Sennewald received a Master of Architecture degree (magna cum laude) from the University of Oregon.

 
Presentation
• Measurements of Temperature Stability and Uniformity in Several Types of Laboratories
Julian Hunt, Bea Sennewald

This session will describe a series of temperature measurements of laboratory spaces undertaken by scientists at the National Physical Laboratory in the U.K.

It will show measurements of stability and uniformity in laboratories with varying types of air flow and varying degree of complexity in temperature control design. The labs include spaces with low-velocity non-directional air flow, unidirectional vertical and horizontal airflow. It will also show measurements of the effect of heat sources in horizontal and vertical air flow.

 
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Bob Erdman


Bob Erdman
Erdman Measurement Consulting

Sensimeas@aol.com

 
Erdman Measurement Consulting
President


Bob has over 40 years experience in making sensitive measurements and managing related projects, mainly at Keithley Instruments, the leading manufacturer of very sensitive electronic measuring instruments. He has designed the most sensitive Ammeter and Voltmeter commercially available, advised many scientists on difficult measurement problems and worked with Scientists and Architects to design nanotechnology buildings.

 
Presentation
Interactions between Nanomeasurements and Nanobuilding Design
The building can limit the Experimenter's ability to make sensitive measurements on nanostructures. A discussion of ways to estimate interference and determine whether shielding is needed and how good the shielding has to be are presented, along with instrument characteristics that impact this determination. Generally, electrostatic shielding must be done at the experiment in any case and the building does not impose a limit to measurement. Magnetic interference is determined by loop area enclosed by current-carrying wire. Building design can be more of a limit in this case. Users and building designers must effectively communicate with each other to understand the limitations of both shielding at the experiment and the building, in order to agree on acceptable levels of interference that will permit nanomeasurements to be made.
Grounding Needs of Instrumentation
› Why the "3rd pin" of the power plug is GROUND, not a reference.
Filters and capacitance dump ac currents into this line.
Some equipment has ac power line current in this line.
Therefore the voltage with respect to the earth is different at different points.
It can be volts away from the experiment ground
In general it is not quiet, thus transmits noise into a grounded experiment.

› Impact of this on the measurement and instrumentation:
Discussion of CMRR, related to NMRR from my Wednesday talk.
Calculation of CMRR errors, typical numbers
Quick review of coupling mechanisms from Wednesday:
If the shield is tied to a noisy ground, it becomes an unwanted transmitter

A Reference Bus solves these problems.
How to handle it: rules for connecting 
Tie to earth
Tie to building ground at point of earth connection

 
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Dr. Clayton Teague

Clayton Teague
National Institute of Standards and Technologies

clayton.teague@nist.gov

 
National Institute of Standards and Technology
Division Chief, Manufacturing Metrology Division
Manufacturing Engineering Laboratory


Dr. Teague is Chief of the Manufacturing Metrology Division in the Manufacturing Engineering Laboratory of the National Institute of Standards and Technology.

At NIST since 1972, Dr. Teague has designed, constructed, and used precision instrumentation for ultra-high accuracy dimensional metrology of surfaces and micrometer to nanometer-scale features. Beginning with his metal-vacuum-metal tunneling work in the 1970's, he continued to work with such precision instrumentation as scanning tunneling microscopes, atomic force microscopes, displacement and phase-measuring interferometry, stylus instruments, flexure stages, and light scattering apparatus. Because the laboratory and building environments were always factors in the ultimate performance of these instruments, the subject of this workshop has been an ongoing topic of great interest.

Dr. Teague is a member of the American Society for Precision Engineering, has served twice as the Society's President, and is a fellow of the UK Institute of Physics. He served as Editor-in-Chief of the international journal Nanotechnology for ten years and is currently a member of the Editorial Board of the journal. He holds a B.S. and M.S. in physics from the Georgia Institute of Technology and a PhD in physics from the University of North Texas. He has authored or coauthored 70 papers, has presented 50 invited talks in the technical fields described, and jointly with colleagues, has six patents. Dr. Teague has received the Gold Medal, Silver Medal, and Allen V. Astin Measurement Science Award from the Department of Commerce, the Kilby International Award by the Kilby Awards Foundation, and an IR-100 Industrial Research and Development Award for his work.

Presentation
• Introduction

This introduction covers the workshop motivations, goals and objectives as well as general logistics. It also includes an overview of the session topics and the general organization of the sessions.

• Technical Survey

During this session, we will present and discuss entries for the technical survey that was developed by the organizers and made available to all speakers and attendees via the workshop’s website.   Developing and making available agreed upon technical performance specifications for the important environmental properties of workspaces in facilities for advanced science and technology is one of the principal goals for the workshop.  Proposed entries in the tables will be based on results from the survey, information contributed during the workshop talks and dialog among workshop participants.  Included in the survey are tables for temperature control, relative humidity, atmosphere control and cleanliness, electrical power, tilt stability and vibration levels of laboratory floors, background acoustic noise levels in laboratories, and background EMI & RFI levels in laboratories.  Four levels of specifications have been chosen for each of the environmental properties: Class 1: the “standard” laboratory; Class 2: the “clean room” laboratory; Class 3: the “atomic manipulation/measurement” laboratory; and Class 4: the “high-accuracy metrology” laboratory.   Entries in the tables for each of the environmental properties will represent both experience and knowledge of what can be achieved and the performance levels required for a specific application.  The goal for this session is to complete the survey and to allow time for participants to present their points of view about the proposed specifications.

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Dave Bechtol


Dave Bechtol
HDR Architecture, Inc.

dbechtol@hdrinc.com

 
HDR Architecture, Inc.
Senior Vice President
Professional Associate
Electrical Section Manager


Mr. Bechtol is a Senior Vice President and a Professional Associate of HDR and the Electrical Section Manager. He has over 23 year of experience in the planning and design of lighting, power and communication systems for laboratory, institutional, health care and justice facilities.

Mr. Bechtol has designed laboratory electrical systems for the Department of Defense and the Food and Drug Administration. His university laboratory experience includes Johns Hopkins, Duke, UNC and UVA. At the National Institute of Standards and Technology (NIST) Advanced Measurement Laboratory, Mr. Bechtol developed a power distribution system to provide two sources of clean isolated power to each lab to reduce the effects of power disturbances from adjacent labs and from building equipment including lights, elevators and mechanical equipment. He is currently the lead electrical engineer for the Purdue University Birck Nanotechnology Center.

Mr. Bechtol received a Bachelor of Architectural Engineering degree from Penn State in 1979. In 1984, he received his Professional Engineer's license. He is a member of the Illuminating Engineering Society (IES) and the International Association of Electrical Inspectors.

 
Presentation
• Designing for Clean Power

The effects on sensitive electronic equipment form external and internal sources of power disturbances can be mitigated by the application of various types of power conditioning equipment and/or by varying the configuration of the power distribution system in a way to provide clean power to the sensitive equipment.

Transient voltage surge suppression devices, isolation transformers, uninterruptible power supplies, generator and other types of power conditioners can be used to protect lab equipment from one or more different types of power disturbances.

Varying the configuration of the power distribution system can in itself improve power quality at the lab. By applying power conditions at selected locations within the distribution system, the quality of power can be greatly enhanced.


 Systems Integration and Competing Criteria

Ahmad Soueid, Dave Bechtol, Hal Amick

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Eric E. Ungar
Sc.D., P.E.


Eric Ungar, PE
Acentech Incorporated

eungar@acentech.com

 
Acentech Incorporated
Chief Engineering Scientist

After receiving his BSME degree from Washington University in St. Louis, Dr. Ungar worked for three hears on development of second-generation atomic weapons at Sandia Corporation in Albuquerque, NM. There he also attended the University of New Mexico, from where he received his MS degree. Subsequently, he served as instructor in mechanical engineering at New York University while he pursued his doctoral studies. He was awarded the degree of Doctor of Engineering Science from NYU in 1957 and then was appointed assistant professor. In 1959 he joined the renowned research and consulting firm of Bolt Beranek and Newman, Inc., in Cambridge, MA, where he held several technical and management positions until his retirement from there in 1996 as Chief Consulting Engineer. Since then he has been serving as Chief Engineering Scientist at Acentech Incorporated in Cambridge, MA.

Dr. Ungar is a Fellow of the Acoustical Society of America and served as that society’s President in 1992-93. He is a Life Fellow of the American Society of Mechanical Engineers and held the chairmanship of its Design Engineering Division in 1978-79. He is a board-certified member of the Institute of Noise Control Engineering, whose presidency he held in 1985, and he is an Associate Fellow of the American Institute for Aeronautics and Astronautics.
In addition to having published well over 200 technical papers and more than a dozen chapters in handbooks and monographs, Dr. Ungar has translated and revised the book “Structure-Borne Sound”, which is considered as a classic in its field. He has chaired highly regarded short courses on Vibration Control at the Pennsylvania State University for more than twenty years and has lectured in these and numerous other courses in the US, Sweden, France, Brazil, and Australia.
The American Society of Mechanical Engineers awarded him its Per Bruel Gold Medal “for fundamental contributions to noise and vibration control engineering involving structural damping, vibration isolation, and vibrations of complex structures, as applied to aerospace vehicles, ships, machines, and buildings.” The Acoustical Society of America honored him with its Trent-Crede medal “for his important contributions to our understanding of vibrations in complex structures, the effects of structural damping, and the propagation of structure-borne sound.”

Dr. Ungar has consulted on vibrations of numerous high-technology facilities, including nano-mechanics and microbiology laboratories and installations for advanced, optics, and astronomy research. He also has served as consultant on facilities that require high resistance to vibration-related damage or malfunction, including the President’s helicopter hangar and various aircraft test cells. He has pioneered in the development of what has become the standard method for predicting footfall-induced vibrations in buildings that house sensitive devices and has consulted on vibration isolation of instruments, machinery, and entire buildings.

 
Presentation
• Vibration Isolation at Building Level
(Vibration Control)

In order to discuss the process of vibration control in advanced technology facilities, one must have a rudimentary understanding of how vibrations are characterized. This presentation will open with a discussion of some of the vocabulary and quantities associated with vibrations and their representation. The basic quantities of sinusoidal vibrations will be discussed, along with those associated with random and/or impact excitation. Typical interior and exterior sources are discussed, along with typical approaches to their control.

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Hal Amick

Hal Amick
Colin Gordon and Associates

hal.amick@colingordon.com

 
Colin Gordon and Associates
Vice President, Technology Development


Mr. Amick received a Bachelor of Science in Civil and Architectural Engineering from the University of Wyoming in Laramie, Wyoming, a Master of Science. in Structural Engineering at the University of California, Berkeley, California and a Master of .Engineering. In Civil Engineering from the University of California in Berkeley, California. Mr. Amick works on problems related to structural and soil dynamics, rail and transportation vibrations, mechanical vibrations, and community or workplace vibrations. He is experienced in signals processing, finite element modeling and many aspects of structural and soil dynamics. Hal Amick has worked extensively in the design of low vibration environments for advanced technology facilities.

Hal Amick joined Colin Gordon & Associates in 1996, after spending eleven years with Bolt Beranek & Newman and Acentech. Prior to 1990, he worked closely with Colin Gordon at BBN. At Colin Gordon & Associates he focuses on the design and maintenance of low-vibration environments for vibration-sensitive facilities used for research, development and production of microelectronics as well as those used for nanotechnology, optics research, advanced physics and bioscience studies. His early consulting work involved a wide variety of structural settings, including nuclear power plant seismic analysis, container crane design, and structural failure analysis. Since 1993 he has served as vibration consultant for design and renovation of laboratories at the National Institute of Standards and Technology (NIST). Mr. Amick’s selected project experience includes: Advanced Measurement Laboratory (NIST); M. D. Anderson Cancer Research Center; Genentech Hall (Building 24), University of California, San Francisco, Mission Bay Campus;Knudsen Hall West, UCLA; Huntsman Cancer Research Center, University of Utah; California Nano Systems Institute, University of California at Santa Barbara; Birck Nanotechnology Research Center, Purdue University; P-050 Nano Science Research Laboratory, Naval Research Laboratory; and Seagate Research Center.

Hal Amick has written and presented many papers and reports, and has published extensively.

 
Presentation
• Isolating Instruments from Building Vibration
(Reducing Vibration Within the Building)

The ultimate objective of the vibration engineer-when designing buildings for advanced technology-is to protect vibration-sensitive equipment from vibrations. In order to do this in an economical manner, the engineer must
establish the vibration requirements of the items of equipment that will be used. Not all instruments are equally sensitive. The tests used to document vibration sensitivity will be discussed, and this will lead to a presentation of generic vibration criteria.

The first session discussed means by which the designer controls vibrations within the building system itself. In many cases, however, it is desirable to reduce vibrations at the equipment itself, using either external or internal vibration isolation systems. Options are discussed for internal vibration isolation systems-usually within the purview of the equipment designer-as well as external isolation systems-under the control of either the building designer or the equipment user.

 Systems Integration and Competing Criteria

Ahmad Soueid, Dave Bechtol, Hal Amick

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James V. Bartlett
Jr. PE

James Bartlett
.Bartlett Consulting.

james.bartlett@nist.gov

 
Bartlett Consulting
Principal


Mr. Bartlett is the Principal of Bartlett Consulting with over 35 years experience in facilities engineering. He is currently the Quality Assurance Manager for construction of NIST's $200 million Advanced Measurement Laboratory (AML), responsible for ensuring the construction contractor builds the AML in accordance with the very specialized construction features specified in the contract. The AML is designed to meet the stringent requirements of NIST's most sensitive and critical laboratory programs in the areas of temperature and humidity control, vibration isolation, air cleanliness, electrical power quality and electromagnetic interference. All of these requirements are being met on a scale unlike any other in the world. All aspects of the construction process and building trades contribute to the total finished facility.

Prior to this project, Mr. Bartlett was a civilian in the Naval Facilities Engineering Command, serving in a series of management and leadership positions: Director of Client Liaison for the Navy's $8 billion facilities enterprise world-wide; Director, Facilities Acquisition Directorate; Director, Interagency Construction Division; Director, Navy Military Construction Division; and, from 1982 to 1987, Director of Program Management for the $2 billion, 10-year construction program to build a TRIDENT Submarine base in Georgia. From 1978 to 1980, he was a Design Engineer for the Smithsonian Institution, preparing plans and specifications and managing Architect/Engineer contracts. From 1967 to 1978, Mr. Bartlett was an officer in the Navy's Civil Engineer Corps and had tours managing construction; Seabee Company Commander in Viet Nam; various public works jobs in Japan; and staff duty with the Strategic Systems Projects Office in Washington, DC. After release from Active Duty, he remained active in the Reserves, including a tour as a Seabee Commanding Officer, and retired in 1997 as a Captain, after 30 years of commissioned service.

Mr. Bartlett holds a Bachelor of Science degree in Electrical Engineering, and a Master's degree in Engineering Administration (Construction Management). He is a registered Professional Engineer in Virginia. Mr. Bartlett has served as Chairman, Research Committee; Chairman Fully Integrated and Automated Project Process (FIAPP) Committee, both of the Construction Industry Institute and Chairman, Project Management Committee, of the Federal Facilities Council (a consortium of over 20 federal agencies).

 
Presentation
• Quality Assurance Considerations in Advanced Technology Building Construction
James Barlett, Todd Snouffer

Constructing Advanced Technology Buildings takes special forethought and focus to actually achieve what is required to have them perform. Advanced Technology construction requires special construction methods and rigorous attention to details. This presentation will cover the emphasis needed during the construction process and present some lessons learned.

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James Murday

James Murday
National Nanotechnology Initiative

Naval Research Laboratory

murday@nrl.navy.mil

National Nanotechnology Coordinating Office
Director


Naval Research Laboratory
Head, Chemistry Division



Dr. James S. Murday received a Bachelor of Science in Physics from Case Western Reserve in 1964, and a Ph.D. in Solid State Physics from Cornell in 1970. He joined the Naval Research Laboratory (NRL) in 1970, led the Surface Chemistry effort from 1975-1987, and has been Superintendent of its Chemistry Division since 1988. From May to August 1997 he served as Acting Director of Research for the Department of Defense, Research and Engineering. He is a member of the American Physical Society, the American Chemical Society and the Materials Research Society; and a fellow of the American Vacuum Society (AVS), and the UK Institute of Physics. For the AVS, he has served as trustee for 1981-1984, director for 1986-1988, representative to the American Institute of Physics Governing Board 1986-1992, president for 1991-93, and representative to the Federation of Materials Societies 1998-present.

His research interest in nanoscience began in 1983 as an Office of Naval Research program officer and continues through the NRL Nanoscience Institute. He has organized numerous International STM/NANO conferences and their proceedings. Under his direction, both the AVS and the International Union for Vacuum Science, Technology and Applications created a Nanometer Science/Technology Division. He is Executive Secretary to the U.S. National Science and Technology Council's Subcommittee on Nanoscale Science Engineering and Technology (NSET) and Director of the National Nanotechnology Coordinating Office.


 
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James Whetstone

James Whetstone
National Institute of Standards and Technologies

james.whetstone@nist.gov

 
National Institute of Standards and Technology
Chief, Process Measurements Division

 














 
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Jeffrey W. Roblee

Jeff Roblee
Precitech, Inc.

jroblee@precitech.com

 
Precitech, Inc.
Vice-President of Engineering

Since February of 2002, Jeffrey W. Roblee has been with Precitech of Keene, New Hampshire where he holds the position of Vice President of Engineering. Precitech is a world leader in the design and manufacture of ultra precision machine and metrology systems.

From 1977 to 1990, Dr. Roblee held research positions at Lawrence Livermore National Laboratory in California. There he developed ultra-precision machine tools and measuring instruments for use in optics fabrication. As part of this work, he was involved in numerous facilities development for these devices. His research work led to a 14 month assignment at Phillips Research Laboratory in The Netherlands in 1986 and then to a research position at Carl Zeiss in Oberkochen, Germany in 1990. As a member of the Optical Process Development Laboratory, he led four projects that improved the fabrication time, precision and finish of optical components by more than a factor of two.

In late 1993 he joined the Optical Engineering Department at Polaroid Corporation in Cambridge, Massachussetts. At Polaroid, Dr. Roblee led a program to develop a laser print head for use in making medical images and other purposes. In 1997 he received Polaroid’s title of Distinguished Engineer and the Engineering Excellence Award from the Optical Society of America in recognition of his work on improving optical fabrication processes. Dr. Roblee was named Technical Director in 1998 with responsibility for three departments in Polaroid R&D: Model Shops, CAD Technology Center and Concept Engineering. In early 2001 he was chosen to lead the Optical Engineering Department as well.

Dr. Roblee holds a number of patents and has written numerous papers on temperature control, machine dynamics, air bearing design, optics fabrication and opto-mechanics. He is currently a member of the American Society of Precision Engineering. Jeffrey W. Roblee has a M.S. and Ph.D., both in mechanical engineering, from the University of California at Berkeley, 1979 and 1985. His B.S.M.E. is from the University of Arkansas, 1978.

 
Presentation
• Case Studies of Precision Temperature Control Systems for Air Showers and Liquids at Lawrence Livermore National Laboratory
The impact of temperature fluctuations on the accuracy of machine tools and metrology instruments has been recognized for some time.  Many studies have been done over the years, and thermal effects are clearly the largest source of nonrepeatable error in precision machine tools and measuring machines.  Consequently, Lawrence Livermore National Laboratory has had numerous programs over the last forty years to mitigate the effects of temperature.  In this talk, I will review some of the more important developments at LLNL in precision temperature control.  I will discuss the principles that were used, and illustrate them with some case studies.  Systems have been developed to precisely control the temperature of large flows of oil, water and compressed gas.  Seperate means were also used to control air showers over individual machines, but similar principles of temperature control were used.  Different implementations are possible for doing precision temperature control, but it was found that very high levels of precision were possible at relatively low cost, if proper principles were followed.  Temperature control systems were essential to the success of the Large Optics Diamond Turning Machine at LLNL, and they will be one of the case studies that will be discussed in detail..  It used 500 l/min of water which was controlled to +/- 0.0002 degrees C, and it used an air shower with 570 cubic meters per minute flow which was controlled to +/- 0.002 degrees C for days at a time.
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John Lawall

John Lawall
National Institute of Standards and Technologies

john.lawall@nist.gov

 
National Institute of Standards and Technology

Dr. Lawall came to NIST as an NRC postdoctoral fellow in the Laser Cooling and Trapping group in 1995.  Since 1997 he has been a staff member in the Quantum Metrology Group.  His current research work involves ultra-high accuracy laser interferometry with stabilized CW lasers, and frequency combs using mode-locked femtosecond lasers.

Dr. Lawall received his B.S. degree in physics from Stanford University and his PhD in experimental atomic physics from Harvard University.  Prior to starting his PhD work, he spent two years as a Peace Corps volunteer in Mali, where he taught mathematics at the Lycée de Segou and constructed energy-efficient wood stoves.  Following his doctoral degree, he was a Chateaubriand postdoctoral fellow in Paris at the Ecole Normale Superieure, where he was instrumental in laser cooling a three-dimensional gas of atoms to 180 nanoKelvin, the record temperature at that time.

In his spare time Dr. Lawall plays the violin and viola in chamber ensembles and enjoys whitewater kayaking.

 
Presentation
• Acoustic and Vibration Control in Vacuum: A Case Study
I will present the approach of an experimental physicist to the problem of control of seismic and acoustic disturbances in a vacuum environment. I will start with a brief discussion of vibration isolation by means of a passive resonant system, illustrated with experimental data taken with springs and elastomers. I will then show the vibration level present on the floor of a good underground laboratory environment, and the amount of suppression one achieves with conventional optical tables. Next, I will show the system we have built at NIST in order to prototype optical interferometers in a high-vacuum environment. The environmental isolation mechanisms are activated sequentially, in order to illustrate the isolation achieved by each stage and the compromises that some stages entail. This approach helps to illustrate what fraction of the vibrations is of acoustic origin and what fraction is seismic, and the importance of controlling both is made manifest. Disturbances are measured with both an accelerometer and a high-finesse Fabry-Perot interferometer. One important conclusion of this work is that the vibration imposed by a maglev turbomolecular pump is easily controlled to the extent that it is unlikely to contribute significantly to the ultimate vibration of even a very quiet system.
It will be shown that our relatively simple system offers vibration isolation not only vastly surpassing that of a conventional floating optical table, but in fact better than the ion-pumped NIST X-ray interferometer.
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John Weaver

John Weaver
Delphi Delco Electronics Systems

john.r.weaver@delphiauto.
com

 
Delphi Delco Electronics Systems
Manager, Contamination Control

John Weaver is the Manager of Contamination Control at Delphi Corporation, Delco Electronics Systems. He is responsible for a broad spectrum of contamination control technology, from cleanroom design and construction through all aspects of cleanroom operation. In addition to direct responsibilities within Delphi’s wafer fabs, John provides assistance throughout the corporation and to several universities. He draws on over thirty years of experience in contamination control engineering as well as semiconductor process and device development. John holds two patents, has authored numerous technical papers, tutorials, workshops, and a book on cleanroom design and construction. He works with different organizations on the development of contamination control educational programs and juries technical papers prior to publication. The recipient of multiple contamination control awards, he has worked with several industry committees and is a Principal Member of the NFPA 318 committee, Fire Standard for Cleanrooms. John is a Senior Member of the Institute of Environmental Sciences and President of the Indiana Chapter.

 
Presentation
• Achieving ISO Class 3 in a Retrofit Cleanroom - A Case Study

Over the past eighteen years, there has been a major change in cleanliness requirements for semiconductor cleanrooms and a corresponding change in the design of cleanrooms to meet those requirements. To achieve cleanliness levels of ISO Class 3 (formerly Class 1 per Federal Standard 209E), a new cleanroom is generally designed and constructed. In the case of the Roland Project at Delphi Delco Electronics Systems, a portion of a 1985-vintage Class 10 (Fed. Std. 209E) cleanroom was modified to achieve the more stringent requirements of ISO Class 3.  This case study discusses the design of the facility modifications and the implementation of the construction project that achieved the cleanliness goals for the cleanroom. Included in the project were modifications to the air handling system and terminal filters, upgrades to the utilities supplied to the facility, modification of the bay-chase design of the cleanroom, and the installation of an entirely new tool set. All these were accomplished while maintaining production in the adjacent Class 10 portion of the cleanroom, which was in continuous operation. Also discussed are the clean-construction protocols that were utilized during the project and the final commissioning of the facility.
The project was completed successfully, meeting all of the cleanliness goals without interruption of, or cleanliness impact on, the adjacent production facility. The cleanroom modifications were achieved on-time and on-budget, and all product-cleanliness targets were exceeded.

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Joseph A. Stroscio

Joseph A. Stroscio
National Institute of Standards and Technologies

joseph.stroscio@nist.gov

 
National Institute of Standards and Technology
Physicist, Electron Physics Group


Dr. Stroscio is a physicist in the Electron Physics Group in the Physics Laboratory of the National Institute of Standards and Technology. He joined NIST in 1987 after completing a two year post-doc at the IBM T. J. Watson Research Center where he pioneered the development of scanning tunneling microscopy and spectroscopy measurements with Randal M. Feenstra. At NIST his research interests continued in condensed matter physics with an emphasis on nanoscale physics. His research has encompassed areas including MBE growth of metal and semiconductor systems, nanoscale magnetism, superconductivity, and atomic manipulation. Dr. Stroscio has designed and constructed numerous state-of-the-art scanning probe systems to accomplish his research, including most recently, the design and construction of the Nanoscale Physics Facility, which contains one of the most advanced scanning probe systems that operates in ultra-high vacuum, cryogenic, and ultra-high magnetic field environments.

Dr. Stroscio received his PhD degree from Cornell University in the area of surface physics. He has authored or coauthored over 65 publications. Dr. Stroscio has been elected to fellow of the American Physical Society and the American Vacuum Society and he has received the Arthur S. Flemming Award, the Department of Commerce Silver Medal Award, and the Sigma Xi Young Scientist Award for his work at NIST. He has served on numerous committees of the American Vacuum Society, and is serving on the Editorial Board of Review of Scientific Instruments.

 
Presentation
• Design and Operation of the Nanoscale Physics Facility in the NIST Physics Laboratory
The Nanoscale Physics Facility in the NIST Physics Laboratory contains one of the most sophisticated scanning tunneling microscope systems for nanoscale physics research, and posed a number of engineering challenges to meet its design goals. The type of studies that are undertaken in this system range from atomic manipulation of individual atoms to create ideal nanostructures to spectroscopic studies of the quantum properties of nanostructures. To accomplish these studies a microscope system was designed and constructed that operates in multiple extreme environments including: ultra-high vacuum (10-11 Torr), low temperature (2 K), and ultra-high magnetic fields (10 T). The design goals included operating in these environments with imaging and spectroscopic measurements with a tunneling vacuum gap separation stable at the picometer level. The design of the Nanoscale Physics Facility included combining the tunneling microscope system with molecular beam epitaxy systems, for versatility in nanoscale physics research projects. In this talk I will discuss the challenges to meet these design goals, including solutions to overcome building environmental noise sources, as well as the design details needed in operation of a scanning tunneling microscope in these environments. Operation of the facility will be highlighted from recent studies.

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Julian Hunt


Julian Hunt
National Physical Laboratory

julian.hunt@npl.co.uk

 
National Physical Laboratory
     Teddington, United Kingdom
 Corporate Director

Dr Julian B Hunt is a Corporate Director of the National Physical Laboratory, with responsibility for managing NPL scientist's input to the 'design and build' of the new NPL building, the overseeing, management and control of the move from the present NPL buildings to the new building, minimising disruptions to business activities wherever possible, and for optimising the use of both the old and new buildings during this transitional period.

Dr Hunt received a Batchelor of Science in Physics from Queen Mary College, University of London in 1963, and a Ph.D in Nuclear Physics from the same University in 1967. He joined the National Physical Laboratory in 1966, and led the Neutron Metrology Group from 1974 until 1989. He developed a number of different techniques and instruments for the accurate measurement of neutron fluence over the neutron energy range from 1 keV to 6 MeV. During that time he also participated in a number of international comparisons of neutron fluence measurements organised under the auspices of the Bureau des Poids et Mesures (BIPM). From 1989 to 1996 he was responsible for the formulation of the Radiation Dosimetry programme at NPL and for its delivery in order to meet the aims and objectives of the National Measurement Policy Unit of the UK's Department of Trade and Industry (DTI/NMSPU). In 1996 his responsibilities expanded to cover the full extent of the DTI/NMSPU Ionising Radiation Programme, comprising Radiation Dosimetry, Radioactivity and Neutron Measurements. He continued in this role until November 1999 when he join the NPL Executive Board as a Corporate Director with responsibilities for coordinating NPL's input to the design and build of the new NPL building, and to maximising the benefits from occupying first class laboratory facilities.

Dr Hunt has been a member of a number of UK, European and international committees concerned with the specification and characterisation of neutron radiation fields. He has authored or co-authored over 60 papers and has presented more than 30 papers either as invited talks or as research papers, mainly concerned with neutron metrology.

 
Presentation
• Measurements of Temperature Stability and Uniformity in Several Types of Laboratories
Julian Hunt, Bea Sennewald

This session will describe a series of temperature measurements of laboratory spaces undertaken by scientists at the National Physical Laboratory in the U.K.

It will show measurements of stability and uniformity in laboratories with varying types of air flow and varying degree of complexity in temperature control design. The labs include spaces with low-velocity non-directional air flow, unidirectional vertical and horizontal airflow. It will also show measurements of the effect of heat sources in horizontal and vertical air flow.



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Dr. Kamal Hossain


Kamal Hossein
National Physical Laboratory

kamal.hossain@npl.co.uk

 
National Physical Laboratory
      Teddington, United Kingdom
  Director of Science and Technology

Kamal Hossain is the Director of Science and Technology at the National Physical Laboratory, UK. After obtaining his PhD from Cambridge University, Kamal has been involved in personal research in the high temperature materials field, government policy work in the UK Department of Trade and Industry and various international activities. He has been the Chairman of VAMAS – the leading international initiative in pre-normative R&D in the materials field. He is also a member of the European Commission Advisory Group for the new Framework programme for Research and a Vice President of CEN STAR – the high level Working Group in CEN with the responsibility of improving links between standardisation and research. Currently Kamal is responsible for developing and implementing the Laboratory’s strategy for science. This includes directing the development of programmes and facilities.

 
Presentation
• Science Needs for High Performance Laboratories
In this presentation, NPL's priority areas for development in measurement science for the future will be described briefly. This will include fields such as nanotechnology, quantum metrology, biotechnology and photonics. Potential requirements for future laboratory facilities to achieve our strategic plan for science will be discussed.



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Larry Allard


Larry Allard
ORNL

L2A@ornl.gov

 
Oak Ridge National Laboratory, High Temperature Materials Laboratory
Distinguished Research Staff Member

Larry Allard obtained all three of his degrees at the University of Michigan in the Materials Science and Engineering Dept. He started his EM career in 1963 as a sophomore at the U of M, working as a research assistant in the High Temperature Metallurgy group, where he studied microstructures of stainless steel and nickle-based superalloys to characterize creep-rupture failure mechanisms. In 1969, he joined the Materials Characterization group at the Oak Ridge Gaseous Diffusion Plant, where he worked on materials problems related to uranium isotope separation for two years before returning to Michigan to help establish the university’s Electron Microbeam Analysis Laboratory. After working in the chemical industry for American Cyanamid Company in Stamford, CT for 2 years, in late 1986 he returned to Oak Ridge, and is now a Distinguished Research Staff Member in DOE's High Temperature Materials Laboratory, a National User Facility located at Oak Ridge National Laboratory. His current research involves studies of structural ceramics, ion-implantation for surface modification, nanophase composite materials, catalytic materials, and instrumental developments involving electron holography, digital imaging and remote instrument operation. He is the author or co-author of more than 170 journal articles, and has co-edited several conference proceeding and books, including the first definitive textbook on electron holography, “Introduction to Electron Holography,” published by Plenum/Kluwer in 1999.

Presentation
• The Aberration Corrected Electron Microscope (ACEM) at ORNL

The Advanced Materials Characterization Laboratory (AMCL): The presentation will cover the design of the laboratory and its purpose. The Aberration Corrected Electron Microscope (ACEM) coming to the HTML and several other microscopes being developed for ORNL will require a very special environment in order to reach their design resolution. Electromagnetic fields, mechanical vibration, noise, room temperature fluctuations, and barometric pressure changes all have the ability to degrade microscope performance. The ACEM, for example, will need to have ambient electromagnetic fields below 0.3 milligauss; nowhere in the existing HTML building is the field below 1 milligauss. The AMCL will be designed to minimize all potential deleterious environmental influences. The ACEM will be housed "room within a room," and will be operated from an adjoining control room. Thus there will be no operator with the instrument, which will minimize noise and thermal fluctuations.
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Lou Vitale


Lou Vitale
VitaTech Engineering, LLC.

lvitale@vitatech.net

 
VitaTech Engineering, LLC.
President and Chief Engineer

As President & Chief Engineer, Mr. Vitale delivers EMF lectures and presentations to school districts and corporations regarding perceived threat and public health issues, presents professional EMF training seminars, performs EMF surveys, designs shielding/cancellation systems and directs research activities. He has established a working relationship with federal agencies (EPA, FCC, DOE, NIESH) responsible for EMF health and policy issues. Besides his EMF expertise, Mr. Vitale has more than 20 years of program management, systems engineering, software development and electronic design experience in several other technical disciplines including biomedical engineering; military command, control and communications systems (C3S); and, broadcast television systems.

During his career, Mr. Vitale has held senior technical management positions with Booz • Allen & Hamilton in Washington, D.C., National Broadcasting Company (NBC) in New York City, UNISYS in New York and Mercury Middle East in the United Kingdom and Kuwait. As President of a biomedical research and development company, he invented and designed a battery powered, portable, microprocessor controlled electrocardiograph (ECG) monitor called the VitaScope. Mr. Vitale has a B.S.E.E. in electrical engineering from the University of Florida and a B.S./BA in biochemistry and medieval history from the State University of New York at Stony Brook. He has an inactive Top Secret clearance and published numerous EMF articles and technical papers.

 
Presentation
• EMI/RFI: cause; site analysis; building evaluations; mitigation solutions

Electromagnetic interference (EMI) affects various types of laboratory equipment, which are becoming more and more sensitive to extremely low frequency (ELF) and radio frequency (RF) interference. Electron microscopes manufacturers are typically specifying that the ambient AC magnetic fields near the microscope not exceed 1.0 mG.

Conducting a field survey at the proposed site to record ambient electromagnetic fields is essential in understanding the initial site conditions. Meeting with users and surveying their existing laboratories provide significant feedback into the establishment of design criteria for the new laboratory spaces.

With good preplanning, many of the common EMI sources found in a laboratory building can be located away form the laboratory spaces. Where EMI sources are required in or near the lab as part of its basic operation, a mixture of shielding techniques using various construction materials and methods along with actual shielding materials can be provided to maintain the necessary environment. Computer simulations can be preformed to verify proposed laboratory and building configurations.

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Mark Jamison


Mark Jamison
HDR Architecture, Inc.

mjamison@hdrinc.com

 
HDR Architecture, Inc.
Director Of Advanced Technology


Mr. Jamison is a Vice President with HDR focused on advanced technology facilities. He is a registered Professional Engineer with more than 20 years of experience in the design and management of projects for state-of-the-art technically advanced facilities. After graduating from Iowa State University with a Bachelor of Science in Mechanical Engineering, Mr. Jamison has spent his career developing the technical design expertise in Mechanical and HVAC systems, as well as Process and Piping for semiconductor facilities, microelectronics facilities, laboratories, research facilities, manufacturing, data centers, and offices and other projects for corporate, governmental and educational clients. He also has construction experience in cleanroom fabrication, cleanroom protocol and tool installation, and has managed numerous design projects including major tool ramps, fab renovations and greenfield fabs.

As a Project Principal Mr. Jamison has led successful project teams both domestically and abroad. He is currently the Project Principal, overseeing the overall management, coordination and client satisfaction for several major projects at HDR. He provides a communication linkage with clients at a top level of authority capable of direct and expedient action with the necessary knowledge of the facility type to ensure proper commitment and utilization of resources. He currently serves a Project Principal for the Purdue University’s Birck Nanotechnology Research Center in West Lafayette, Indiana. This project will provide180,000 SF interactive, interdisciplinary laboratory, cleanroom, office, teaching laboratories and seminar space to pursue research in nanoscale applications. He is also the Project principal for Sandia National Laboratories Center for Integrated Nanotechnologies (CINT) Core Facility. CINT will be a new, state-of-the-art nanoscale science research center jointly operated by Sandia National Laboratories (SNL) and Los Alamos National Laboratory (LANL). Other relevant projects in Mr. Jamison’s portfolio include a 300mm Wafer Fab with Class 100 Process Areas, Vibration Sensitive Processes and Temperature Control of +/- 2°F for Micron Technologies; 15,525 SF Class 100 Cleanroom, 200mm Wafer Fab and Tool Install for a confidential client; 260,000 SF MOS 12 South Fabrication Plant and MOS 12 East Fabrication Plant, iMOS Expansion for Motorola; and 150,000 SF Manufacturing / Test & Assembly Facility including 25,000 SF of Class 10,000 Cleanroom for LSI Logic.
 
Presentation Synopsis
• 300mm Wafer Fab Contamination Control

This presentation will discuss the characteristics of a 300mm wafer fab for industry and how the requirements of this facility type relate to other buildings for advanced technology. Specific contamination issues are identified and cleanroom solutions are outlined to address these issues. The presentation also reviews how evolving semiconductor technology has affected the design of the cleanroom environment and where future technology will lead us.

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Mark Schattenburg


Mark Schattenburg
Massachusetts  Institute of Technology

marks@space.mit.edu

 
Massachusetts Institute of Technology
Principal Research Scientist, Center for Space Research (MIT)
Director, Space Nanotechnology Laboratory
Associate Director, NanoStructures Laboratory
Senior Research Staff, Microsystems Technology Laboratories


Dr. Mark L. Schattenburg is a Principal Research Scientist in the MIT Center for Space Research.  He is Director of the Space Nanotechnology Laboratory, Associate Director of the NanoStructures Laboratory and Senior Research Affiliate with the Microsystems Technology Laboratories.  His principal work has been in the area of micro/nanofabrication technology, optical and x-ray interferometry, x-ray, electron-beam and other advanced lithographies, nanometrology, x-ray optics and instrumentation, x-ray astronomy, high-resolution x-ray spectroscopy, and space physics instrumentation utilizing nanotechnology.  His research group is a world leader in nanometrology research.  His lab has also developed nanotechnology for a number of NASA missions and advanced lithography technology that has been licensed to numerous semiconductor manufacturers around the world.  He sits on the Steering Committee of the International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication, serving as Program Chair in 2003.

 
Presentation
• Environmental Enclosure for the MIT Nanoruler
M.L. Schattenburg, P. Konkola, C. Joo, and C.H. Chen

The Nanoruler is a novel metrology and grating writing/reading system that is designed to rapidly pattern large gratings with a pattern distortion approaching 1 nm, some 100X smaller than current technology. These patterns are intended to be used for the metrology of nanoelectronic and opto-electronic patterns. It performs this task by utilizing a technique called scanning beam interference lithography, invented in our laboratory. This method is a hybrid of holographic patterning and ruling, combining the best features of both. The accuracy of the resulting grating is critically dependant on the accuracy of the high-performance air bearing stage, and this is limited primarily by the laser interferometer. The accuracy of the interferometer, in turn, is overwhelmingly dominated by atmospheric disturbances such as temperature and pressure fluctuations. For the Nanoruler we needed an environmental chamber with stringent control of temperature, pressure, humidity, vibration and acoustics. Working with a vendor we have completed and are testing a chamber that we hope will meet our needs. We will report on why these levels of control are required and preliminary data on chamber performance.

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Mark Stephens. PE


Mark Stephens
EPRI PEAC

mstephens@epri-peac.com

 
EPRI PEAC Corporation, Semiconductor and Industrial PQ Group
Engineering Manager


Mr. Stephens leads the semiconductor and Industrial power quality group at EPRI PEAC Corporation. He works extensively on resolving power quality problems in all industrial sectors including semiconductor manufacturing. As the project engineer, Mr. Stephens led the EPRI Task 24 research that helped foster the SEMI F47 standard. He participated in the SEMI power quality standards task force from its inception to the end of the effort and the passage of the SEMI F42, F47, F49, and F50 standards. He has over fourteen years of professional experience including instrumentation and control systems engineering and power quality solutions. His design experience includes instrumentation specification, control system integration, and equipment installation and startup. In 1995, his research into computer tolerance of electrical disturbances helped to inform the revised CBEMA curve for voltage tolerance of information technology equipment. A Registered Professional Engineer, Mr. Stephens received a B.S.E.E. from the University of Tennessee. He has participated in or directed power quality related work for Alcatel, Applied Materials, ASM Europe, Axcelis, Carrier, CFM Technologies, Confidential Sites (Singapore), CTI, Dunham-Bush, ESI, Exxon Mobil Chemical, Ford Electronics, FSI International, GE Glass, Genentech, GM, Hewlett Packard, IBM, International Rectifier, KLA-Tencor, Lambda EMI, LSI Logic, LWD, Motorola, Novellus, Philips Semiconductor, PP&G Industries, Pratt & Whitney, Reliability, Inc., Rudolph Technologies, Schlumberger, SEMATECH, Sony Picture Tube Manufacturing, Sony Semiconductor, Square D, ST Microelectronics, SVG Lithography, SVG Thermco, Tokyo Electron, Toyota, Trane, Varian Semiconductor Equipment Associates, Inc., Winbond, and York.

 
Presentation
• Cost-Effective Power Conditioning for Advanced Technology Buildings

The most common type of electrical disturbance that is detrimental to high tech manufacturing is the voltage sag. This presentation will discuss the use of new battery-less technologies to enable NANO building facility and process systems to be more robust to voltage sags. The presentation will discuss the electrical environment in the United States, the common reasons why process and facility equipment is vulnerable to voltage sags, and what can be done to make more robust systems. The relevance of the semiconductor industry power quality immunity standard SEMI F47-0200 will be discussed as well. Special emphasis will be given to designing systems that have “built-in” immunity to voltage sags such that the use of expensive large scale power conditioning can be minimized.

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Michael Gendreau
INCE .bd.cert

Michael Gendreau
Colin Gordon and Associates

michael.gendreau
@colingordon.com

 
Colin Gordon and Associates
President

Michael Gendreau received his Baccalaureate in Physics from the University of California (Santa Cruz) and M.A. from Mills College in Composition (Electronic Music and Recording Media). Gendreau has been with Colin Gordon & Associates since 1993, where he currently serves as President and Senior Consultant. Prior to joining Colin Gordon & Associates, he was employed for three years as a vibration and acoustic engineer with Response Dynamics of Oakland, California. He specializes in facility interior vibration and noise control (including the analysis of HVAC and building mechanical systems); structural dynamic testing; machinery vibration isolation; room acoustics; environmental noise studies using computer models; and site studies, including the measurement of environmental vibration and noise, interpretation of local noise regulations and building noise and vibration design criteria; and preparation of environmental impact and design feasibility reports. He is a Board Certified Member of the Institute of Noise Control Engineering, and a member of the Society for Experimental Mechanics, Acoustical Society of America, and the Audio Engineering Society. He has managed and/or acted as a technical resource for a variety of projects related to research, nanotechnology, and semiconductor production. His clients have included Intel (U.S., Europe, Israel), Motorola, Taiwan Semiconductor Manufacturing Corporation (TSMC), Stanford University, and the University of California at San Francisco. Current or recent nanotechnology projects include National Nano Devices Laboratories (Taiwan), LBNL Molecular Foundry (California), Center for Integrated Nanotechnology Core Facility (Arizona), AZ Biodesign Institute (Arizona), National Physical Laboratory Advanced Measurement Laboratory (UK), Argonne National Laboratories Center for Nanoscale Materials (Illinois), and others.

 
Presentation
• Building Design for Advanced Technology Instruments Sensitive to Acoustical Noise

High technology research and manufacturing instruments respond to internal vibration that can be excited by the external acoustic environment. The degree to which this occurs depends on many factors, but primarily the correspondence between the resonance characteristics of the instrument and the frequency content of the acoustic environment in which it operates. Adverse acoustic environments, such as those often found in operating laboratories, can affect the threshold of resolution achievable by the instrument. This presentation will include:

· a review of the basic terminology and criteria used in the acoustical design of advanced technology facilities,
· discussion of the mechanisms by which acoustic noise can interfere with instruments, and
· details of what the building contributes in terms of sources of noise (internal and external) and protection from those sources.

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Michael R. Somin
NCARB, AIA


Michael Somin
Earl Walls Associates

msomin@ewalab.com

 
Earl Walls Associates
Principal


In his over 30 years of experience Mr. Somin has gained a comprehensive understanding of Master Planning, Programming, Laboratory Design Development (Program Drawings), Construction Techniques and Construction Documents. His administrative and design experience with a broad spectrum of laboratory types, as well as a keen awareness of professional performance standards, assures the creativity, coordination and the attention to detail required to meet the high standards of all EWA projects.

As Principal, Mr. Somin has completed projects for Industry and Universities alike. Dedicated to research and teaching, these facilities encompass various disciplines including Biology, Chemistry, Pharmaceutics, Medicine, Engineering, Metrology, Nanotechnology, Animal Facilities, Electronics and many more.

As either Principal or Project Manager, Mr. Somin has participated in many of EWA's most highly acclaimed state-of-the-art facilities including the following award winning Research & Development Magazine Lab of the Year Competition projects: Ciba-Geigy Pharmaceutical Life Sciences Building, Armour Research Center, Aerospace Corporation Ivan A. Getting Laboratories, and the Squibb Institute for Medical Research. Mr. Somin has served on the Space Planning Advisory Board for a large International Pharmaceutical Company, and continues to lecture at numerous research symposiums.

Michael Somin received his Bachelor of Architecture at the University of Illinois in 1962. Prior to joining Earl Walls Associates in 1966, Mr. Somin served as Project Architect on many Educational and Commercial projects for Holabird & Root Architects in Chicago, Illinois. Mr. Somin holds an Architect's license in numerous states, and is a current member of the American Institute of Architects and NCARB.

Currently, Mr. Somin is working on projects for the University of California, Lawrence Berkeley National Laboratory; University of Alaska, Anchorage; Manchester College; Pomona College at Claremont; and the Nano Science Laboratory for the United States Navy.

 
Presentation
• Organic and Chemical Contamination in Advanced Laboratories

The discussion will be organized around the theme of chemical contamination as it relates to biological investigations in an Advanced Technology Facility. We will investigate the challenges of combining BSL-3 or BSL-4 units within high tech cleanrooms. Can the positive pressure and recirculated air requirements of cleanrooms work with the negative pressure and exhausted air needs of biocontainment facilities? We will explore the requirements and outline some possibilities.

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Ralph Morrison


Ralph Morrison
 
www.ralphmorrison.com
 

rmorrigs@pacbell.net

 
Consultant - Instructor

Ralph Morrison graduated in Physics from Cal Tech and received his MS in EE from the University of Southern California. In his early career he designed and manufactured instrumentation for the aerospace industry. This gave him an understanding of how to process very low-level signals over very long distances and maintain signal integrity. This led to his first book in 1967 on grounding and shielding. His physics backsground led him into teaching and consulting in all aspects of interference. He has written 10 books all on the subjects of grounding, interference and signal processing.
His latest book, titled The Fields of Electronics, shows the reader how to use conductor geometry to contain and limit interference. His full biography is listed at his web site: RalphMorrison.com

 
Presentation
• Why all the Noise about Grounding?

A very short history of grounding. Why it is necessary in a facility. The difficulty in using circuit theory to explain facilities, power grids,lightning and other electrical activity. The semantics difficulty. The politics of grounding. Why are there so many divergent views? What is interference and how does it propagate and couple? What are the explanations of how interference enters equipment and modifies signal patterns? What can be done in a facility to make it easier for end users to effectively operate their hardware? When does the problem become the domain of the hardware designer? What are the solutions that help and what are the solutions that cost money and do very little.

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Rod Horning


Rod Horning
Technical Manufacturing Corporation (TMC)

rhorning@techmfg.com

 
Technical Manufacturing Corporation (TMC)
Product Manager, Active Isolation Systems

Mr. Horning received a Bachelor of Science in Aeronautical Engineering from California State Polytechnic College in San Luis Obispo, California. He then joined Northrop Aircraft where he designed vibration test equipment and conducted vibration tests on aircraft components. He then joined Thiokol Chemical Corporation where he participated in the design of a large vibration test facility for large rocket motors.

Mr. Horning joined Barry Controls in 1964 where he first worked with low natural frequency passive pneumatic vibration isolation systems for vibration test equipment.  He then worked on the design and application of pneumatic isolation systems for the isolation of precision laboratory and measuring equipment from seismic level floor vibration. Applications included laboratory equipment such as electron microscopes, atomic force microscopes; measuring equipment such as coordinate measuring machines of all types; and microelectronic manufacturing equipment such as steppers.   He was later involved in the development and application of an electro-pneumatic active vibration control system and a stiff piezo based active vibration control system.

Mr. Horning joined TMC in 1998 where he continued with the development and application of active vibration control systems for precision equipment.  He often uses seismic accelerometers or geophones and a Dynamic Signal Analyzer to determine the vibration environment and to measure the isolation provided by a passive or active vibration isolation system.

 
Presentation
• Latest Vibration Isolation Techniques at Instrument Level Quiet Tables and New Technologies

The presentation will discuss passive isolation systems including very low stiffness mechanical and pneumatic isolation tables. Active vibration isolation systems including soft electro-pneumatic and stiff piezo electric systems will also be presented. The advantages and limitations of each type of isolation system will be presented. The need for a well damped platform between the isolation system and the instrument will be shown. The use of isolation systems with instruments having an internal isolation system will also be discussed.


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Ron Reifenberger


Ron Reinfenberger
Purdue University

rr@physics.purdue.edu

 
Purdue University
Professor of Physics

Ron Reifenberger is currently a professor of Physics at Purdue University and a member of Purdue’s Center for Sensing Science and Technology. He received his undergraduate degree in Physics from John Carroll University in 1970, his PhD in Physics from the University of Chicago in 1976. He joined the Physics faculty at Purdue in 1978 following a two-year post-doctoral appointment in the Physics Department at the University of Toronto. He has received the Distinguished Alumni Award from John Carroll University in 1992, is on the Editorial Board of the Journal of Nanoscience and Nanotechnology, and has been a Conference Co-organizer of the European Trends in Nanotechnology 2001 and Trends in Nanotechnology 2002 Conferences. He recently participated in the international APEC Foresight Committee entitled Nanotechnology, The Technology for the 21st Century. He has co-authored ~130 refereed publications and three US patents.

Since 1986, Reifenberger’s scanning probe group has been active in furthering inter-disciplinary nanoscale research at Purdue by establishing collaborations with faculty from the Chemistry, Electrical Engineering, Chemical Engineering and Mechanical Engineering Departments. His group has focused on research problems that emphasize the role of scanning probe microscopy (SPM) as one of the key enablers of nanotechnology. His current research is focused on non-linear dynamics of SPM cantilevers, micro patterning of substrates for the rapid detection of targeted bacteria, and fundamental measurements related to current flow in molecules, carbon nanotubes and Au nanocluster networks. This work is currently supported by grants from ARO, NSF, DOE, NASA and NAVSEA.
 
Presentation
• Debugging Acoustical Interference; Is it from the Building or the Tool? A Case Study
S. Crittenden, G. Pszota and R. Reifenberger

Scanning Probe Microscopes (SPMs) are essential tools in the investigation of many nanoscale phenomena. It can be argued that these microscopes have been instrumental for the rapid spread of nanotechnology throughout the world. These proximal probe microscopes have vertical resolutions approaching 0.001 nm and are capable of topographically imaging individual atoms on clean, flat surfaces. As such, SPMs demand a high degree of isolation from acoustical building noise and vibration for proper operation. It is common practice, when using these instruments, to blame excessive noise on a variety of causes related to the surrounding environment. We will describe a number of case studies performed in our laboratory to discern whether noise encountered in the operation of SPMs are related to building problems or to shortcomings in the design and construction of the instrument itself. A number of simple techniques will be discussed that help to answer this question. We conclude that many simple things can and will go wrong when using a precise instrument like an SPM, even though it may be housed in a multi-million dollar state-of-the-art nano building.

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Stephen Treado


Stephen Treado
National Institute of Standards and Technologies

stephen.treado@nist.gov

 
National Institute of Standards and Technology
Mechanical Engineer, Building Environment Division



Dr. Treado is a Mechanical Engineer in the Building Environment Division, involved inlaboratory and field testing, along with computer an analytical studies, related to building thermal and energy performance. He first came to the Center for Building Technology as a summer student in 1973, and returned following graduation in 1974. His current research activities include developing and refining test procedures for lighting and plumbing equipment in support of the DOE Appliance Standards program. He also developed and executed a detailed evaluation of the NIST ATL Temperature Control Module, including verification of thermal conditions and control system performance. His research activities include lighting and HVAC system performance, lighting test procedures, the measurement and modeling of the interactions between lighting and HVAC systems, and illumination conditions and task visibility. He has developed, built and operated a test facility for studying the interactions and illumination conditions, and a laboratory for lighting component interactions.

Other research activities have involved the role and impact of fenestration on building energy performance. He has developed and operated the NBS Daylight Laboratory to evaluate the daylighting effects of fenestration systems, and dynamic sky conditions. He has developed a state-of-the-art automated microcomputer data acquisition and analysis system, which is used to process a large array of measurement parameters on a continuos basis, and designed and built a window calorimeter. The NBS Daylight Availability Database has been published based on these measurement data. In carrying out his duties as project leader, he prepares proposals, develops the experimental plans, designs, constructs and installs experimental apparatus and equipment, collects, reduces and analyzes data, and prepares technical reports describing the results. The results of his technical work have been incorporated into IES recommended practices for daylighting design, GSA guidelines for solar shading system utilization and ASHRAE standards for measurement of the solar-optical properties of materials, as well as the ASHRAE Handbook of Fundamentals, and the IES Lighting Handbook.

He has presented the results of his work to national organizations
such as ASHRAE and the Illuminating Engineering Society (IES), and has
published over 50 papers in the technical literature. He is a member of IES and participates on the IES Daylighting Committee and Testing Procedures Committee, and is an associate member of ASHRAE, and a member of TC 4.5 Fenestration Committee. He was awarded the Taylor Technical Talent Award for outstanding applications paper by IES in 1992, and the 1995 Crosby Field Award for the best ASHRAE paper published in 1994.

 
Presentation
• The NIST Temperature Controlled Laboratory Module
Prior to the development of the plans and specifications for the NIST Advanced Measurement Laboratory, a full-scale test module was built, tested and evaluated to assist in the design development and proof-of-concept of the HVAC and control systems for the high-accuracy temperature control laboratory spaces. This presentation will discuss the results of the evaluation and the lessons learned.
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Ted Zsirai, PE


Ted Zsirai
HDR Architecture, Inc.

tzsirai@hdrinc.com

 
HDR Architecture, Inc.
Senior Vice President
Senior Professional Associate


Ted Zsirai is a Mechanical Section Manager, Senior Vice President and Senior Professional Associate of HDR Architecture, Inc. He has over 25 years of experience in HVAC systems design. Ted’s career with HDR started in 1975, in Omaha, Nebraska. He has worked in HDR’s Alexandria, VA office since 1982 where his responsibilities have included the design of complex engineering systems for laboratories, courthouses, hospitals, and other high technology facilities.

The King Abdulaziz University in Jedda, Saudi Arabia included over 5,000,000 square feet of health science center, research laboratories, and other academic facilities. The campus is served by a 36,000-ton chiller plant that was the largest indirect air-cooled plant in the world at the time of its construction. Working for Ellerbe Becket in their Washington, DC office as chief mechanical engineer, Ted was responsible for two major building projects for the General Services Administration. The 1,700,000 square feet National Archives II facility in College Park, Maryland featured a low temperature and low humidity environment coupled with the ultimate in air filtration. Ted was also responsible for the conceptual design of the mechanical systems for the Ronald Reagan Building, the second largest public building in the Metropolitan Washington, DC area.

His recent high technology projects at HDR include the engineering systems design for the Advanced Measurement Laboratory at the National Institute of Standards and Technology in Gaithersburg, Maryland. This building is considered one of the most technologically advanced in the world, and will feature the most modern and extensive nanotechnology facility in existence. No existing laboratory combines the features of close temperature control, vibration isolation, air cleanliness, and power quality into a facility of this magnitude. Ted was responsible for developing HVAC systems to control the temperature within +/- 0.01 °C and humidity within +/- 1% accuracy. He has recently served as technical consultant to the United Kingdom's Department of Trade and Industry in developing high accuracy temperature controls for the National Physical Laboratory, and at this time he is leading the mechanical systems design for the Purdue University’s Birck Nanotechnology Center in Lafayette, Indiana.

He received his first diploma in 1966 in Mechanical Engineering. In 1972, he graduated from the Budapest Technical University, receiving his Master of Science Degree in Building Mechanical Engineering. He has been a member of ASHRAE since 1976.
 
Presentation
• HVAC Design for Nanotechnology Buildings
Nanotechnology facilities present unique design challenges for the HVAC engineers. These buildings require precise temperature and humidity control, a high level of cleanliness, and absence of vibration. In certain areas, the requirement of temperature control can be as high as ±0.01 °C accuracy with humidity maintained within ±1.0%. This talk will focus on the issues of HVAC design in nanotechnology facilities with emphasis on high accuracy temperature control.
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Tim Loughran


Tim Loughran
HDR Architecture, Inc.

TimL@advancetecllc.com

 
AdvanceTEC, LLC
Managing Partner

Tim Loughran is Managing Partner for AdvanceTEC, LLC in Richmond, VA. AdvanceTEC is a design/build firm specializing in the construction of cleanrooms, wafer fabs, and process systems for the microelectronics and semiconductor industries. Tim was formerly the Manager of Design/Build Services for Performance Contracting, Inc. and Division Manager for the Cleanroom Engineering Division of Cleanroom Products. He has over 20 years experience in the cleanroom industry and has published papers on numerous subjects including Clean Packaging Technology, Fan Filter Evaluation, Air Shower Performance, Retrofitting Cleanrooms, and Design/Build Cleanroom Specification and Proposal Evaluation. He is a frequent contributor to CleanRooms Magazine and speaker at the CleanRooms conferences, and former president of his local chapter of the IEST.

 
Presentation
• Matrix Development - A Prerequisite for a Successful Cleanroom Design
One of the most serious and common mistakes made in the design of cleanroom facilities is starting design before all the requirements have been identified. Properly executed programming and planning provide the most reliable foundation for a successful cleanroom design and construction project. Programming, a term utilized in the design community to make information gathering look more attractive to team participants, develops the body of information needed to identify, clarify, and prioritize the cleanroom requirements. This program will discuss the cause and effect of improper programming on the design of a microelectronics facility.
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Tim Miller

Lou Vitale

Purdue University


miller@purdue.edu

 
Purdue University
Manager, Solid State Devices and Materials Laboratory
     School of Electrical and Computer Engineering


Tim Miller received his BSEE from Purdue University 1979, 23 years experience in Solid State research, the last 13 years as Manager of the Purdue University Solid State Devices and Materials research facility, which currently serves over 100 users. Responsible for installation, maintenance, repair and user training on tools such as Pattern Generator, Ion Implanter, MBE, sputter deposition, e-beam evaporation, thermal evaporation, oxidation and diffusion furnaces, and the Type 1 DI water system.

 

 
Presentation
• EMI Issues in a University Microelectronics/Nanotechnology Laboratory

This presentation will present a case study of a laboratory in which stray magnetic fields led to serious performance degradation in an electron beam lithography system, used for high resolution patterning of prototype devices.  In this system, proper operation requires an ac magnetic field level below 3 milligauss.  The procedures used to determine the source of the interference and how the problem was corrected will be described.  The second part of the talk will describe issues related to the design of the Birck Nanotechnology Center.  Specifically, we will discuss EMI related design concerns and describe the design approaches that have been adopted in order to minimize EMI effects, both from the building utilities and from other pieces of scientific equipment.

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Todd Snouffer


Todd Snouffer
National Institute of Standards and Technologies

todd.snouffer@nist.gov

 
National Institute of Standards and Technology
Mechanical Engineer



Todd Snouffer is the Deputy Project Manager for the construction of NIST’s new Advanced Measurement Laboratory (AML) and, since 1993, has seen the project through its planning, design, procurement, and construction stages. As the Contracting Officer’s Technical Representative for the Architect/Engineer design and consulting services contracts for NIST major facilities programs, he has gained invaluable insight into advanced technology research facilities. Mr. Snouffer’s knowledge of the NIST facilities infrastructure and scientific community has enabled him to provide a highly technical approach to meeting the stringent demands of NIST’s most technologically advanced scientific programs.

In his current position, Mr. Snouffer provides detailed technical oversight in such diverse areas as advanced temperature control systems, vibration isolation, laboratory HVAC and plumbing systems, fire protection, building commissioning, and storm water management. In 1996, Mr. Snouffer led a team of contract and Government personnel in the development of the NIST Temperature Control Research Project, laying the groundwork for the 48 High Accuracy Controls laboratories currently being installed in the AML facility.

Mr. Snouffer received his Bachelor of Science in Mechanical Engineering from George Washington University in 1991. He is a licensed professional engineer in the State of Maryland.

 
Presentation
• Quality Assurance Considerations in Advanced Technology Building Construction
James Barlett, Todd Snouffer

Constructing Advanced Technology Buildings takes special forethought and focus to actually achieve what is required to have them perform. Advanced Technology construction requires special construction methods and rigorous attention to details. This presentation will cover the emphasis needed during the construction process and present some lessons learned.

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