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HDR Architecture, Inc.
Principal,
Senior Vice President
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Ahmad
Soueid is a Principal / Senior Vice President of HDR
Architecture, Inc. He joined HDR over twelve years ago
as a registered architect after working for architectural
firms in New York, Connecticut and Texas. He focuses
exclusively on the design and construction of advanced
technology facilities for both private and public sector
clients.
Ahmad Soueid is a registered architect that offers creative
solutions to technically challenging nanotechnology
facilities. Mr. Soueid is a leader in the design of
nanotechnology facilities and he serves as a hands-on
Principal for a prestigious list of nanotechnology projects
such as the NIST Advanced Measurement Laboratory,
a 511,070 square feet $175M state-of-the-art laboratory;
Purdue University's $47M Birck Nanotechnology
Center as well as Brookhaven National Laboratory's
$28M Center for Functional Nanomaterials.
Mr. Soueid also consulted as a
nanotechnology facilities advisor to Mexico's Centro
Nacional de Metrología as well as the U.K.'s
National Physical Laboratory. Mr. Soueid was
co-chairman of the Buildings for Advanced Technology
Workshop (January 2003) organized in part under
the National Nanotechnology Initiative (NNI) in conjunction
with NIST and the Naval Research Laboratory (NRL) as
well as the Buildings for Advanced Technology Workshop
II (January 2004), sponsored by Arizona State University.
Mr. Soueid's is a frequent speaker
at technical conferences. Mr. Soueid's presentation
on the "Technical Challenges of designing Bio-Nano
spaces in a Cleanroom environment" was a featured
case study at a recent Tradeline Conference on Nanotechnology
facilities. Other presentations include a variety of
topics, including "High Accuracy Temperature
Control in Metrology Laboratories" at the Quality
Manufacturing 2000 Conference in Birmingham, United
Kingdom, and a presentation at the "New Trends
in Metrology Workshop" the National Physical
Laboratory in Teddington, United Kingdom as well as
"A Case Study for Designing for Nanotechnology"
to the Ottawa Valley Chapter of ASHRAE in Canada.
Mr. Soueid graduated from
the University of Texas at Arlington where he received
both a Bachelor of Science in Architecture and a Master
of Architecture degree.
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| Presentations |
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Buildings
for Advanced Technology
As Nanotechnology research compels
the scientific world to explore new uncharted territories,
scientists are increasingly demanding more stable research
environments. Scientists are manipulating matter at
the atomic and molecular scales in order to obtain materials
and systems with significantly improved properties.
This level of research imposes more strenuous demands
on the physical environment. These demands include high
levels of accuracy in temperature and humidity control,
vibration and acoustic isolation, air cleanliness (from
particulate and/or biological contaminates), EMI and
RFI shielding as well as the need for good quality electrical
power. Once dubbed state-of-the-art, laboratory facilities
are becoming obsolete to accommodate future research.
Scientists are finding themselves spending time working
on improving the physical environment and diverting
valuable resources away from research. The most economical
fix is to introduce self-contained mini environments
that improve the environmental characteristics around
the experiment, however conflicting environmental criteria
are demanding increasingly complex infrastructures.
Many institutions are realizing the need for designing
and constructing new facilities with criteria that is
more and more restrictive. This presentation elaborates
on advanced technology facilities and provides a quick
overview of international facilities that are either
in design, under construction or recently completed.
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• NIST Advanced Measurement Laboratory Site Overview |
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• Systems Integration and Competing Criteria |
| Ahmad
Soueid, Dave Bechtol, Hal Amick |
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National Institute of Standards and Technology
SEM
Project Leader, Nanometer-Scale Metrology Group
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Dr. András E. Vladár
is the leader of Scanning Electron Microscope Metrology
Project at the Nano–Scale
Metrology Group of the National Institute of Standards
and Technology. He holds M.S. (1977) and Ph.D. (1984)
degrees in Electrical Engineering from the Technical
University of Budapest, Hungary. Until 1991
he worked as a Research Fellow at the Research Institute
for Technical Physics of the Hungarian Academy of
Sciences, Budapest. Dr. Vladár is an
expert in scanning electron microscope (SEM) critical
dimension (CD) metrology; he has developed several
metrology systems based on SEMs. Prior to joining
NIST in 1999, he was a member of the technical staff
of Hewlett–Packard ULSI Research Laboratory and primarily
worked on accurate, fast and effective dimensional
measurement methods for 100 nm silicon integrated
circuit technology. At Hewlett–Packard he established
sound metrology methods, procedures and practices
that significantly improved the speed and quality
of dimensional measurements, surface inspection and
film thickness measurements in the Class 1 integrated
circuit fabrication facility. He identified the main
sources of measurement errors and developed several
successful methods to eliminate many of them.
Dr. Vladár is the member and key contributor to the
work of the Advanced Metrology Advisory Group of
International SEMATECH (ISMT). This group is the only
body of experts in the world that deals with the
special issues of dimensional metrology for the
leading integrated circuit manufacturing. Dr.
Vladár had been instrumental in the development of
new methods to deduce the shape of integrated circuit
structures from top–down view images through
modeling and library–based measurement techniques.
Several researchers and CD–SEM tool manufacturers
are now implementing this idea. He has
advocated the need for the development of a document
that can foster the faster development of better SEMs,
and especially the so–called critical dimension
CD–SEMs. He has also played an important role in the
development of standardized metrology procedures for
the semiconductor community as a whole through
authoring multiple sections in the measurement
guidelines described in the Unified Advanced CD–SEM
Specification published by ISMT.
Dr. Vladár as the leader of the SEM Metrology Project
is the scientific manager for the development and
renewal effort of the metrology SEM. This specialized
tool is currently undergoing major improvements in
hardware and measurement control software.
Additionally, for standard calibration purposes, a new
scanning electron microscope-based, best-in-the-world
dimensional measurement system is being designed. This
instrument is planned to be used in the NIST Advanced
Measurement Laboratory (AML).
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| Presentation |
| Scanning
Electron Microscopy in Real-World Environments |
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Electron microscopes
are working close to atomic levels and it is expected
that they are going to be key imaging and metrology
tools in the upcoming nanotechnology. Almost all scanning
electron microscopes are limited in their operation
by their environment. Usually it is possible to achieve
significantly better performance than the specification
of these tools by the proper design of their environment
and by the use of supplementary compensatory methods.
Vibrations transmitted by the building, air (sound)
and water and gas supply have obvious detrimental effects
to image and measurement quality of these instruments.
Low and high frequency electromagnetic fields interfere
with the electronics of the microscope and also with
the electrons used in the signal generation and detection.
This presentation will present detailed specifications
and requirements for the environment of SEMs; and will
show examples for the various negative effects of the
environment, and some possible methods useful to minimize
them.
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HDR Architecture, Inc.
Senior
Vice President/Principal
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Bea Sennewald's Senior Vice
President of HDR Architecture and HDRs principal
in London. She joined HDR in 1983. Her work has focused
on research, high technology and industrial applications.
She has designed over six million square feet of space
for corporate, academic and government research facilities,
including physical sciences, computer sciences, communications,
biology, materials science, microelectronics, and
toxicology. She is an expert at specialized requirements,
including clean room technology, temperature and vibration
control and electromagnetic shielding.
Ms. Sennewald was a contributing
author for the Handbook of Laboratory Design, has
published frequently in Architecture, Architectural
Technology, Specifications, and R&D. She is a
regular speaker at conferences.
She was also an advisor to the
National Institutes of Health for laboratory design
standards.
She was the design director
for the Advanced Measurement Laboratories for NIST
in Gaithersburg and Boulder. Her recent work includes
projects in England, France, Germany and the Netherlands.
Ms Sennewald received a Master
of Architecture degree (magna cum laude) from the
University of Oregon.
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| Presentation |
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Measurements of Temperature Stability and Uniformity in
Several Types of Laboratories |
Julian
Hunt, Bea Sennewald
This session will describe a series of temperature
measurements of laboratory spaces undertaken by scientists
at the National Physical Laboratory in the U.K.
It will show measurements of stability
and uniformity in laboratories with varying types of
air flow and varying degree of complexity in temperature
control design. The labs include spaces with low-velocity
non-directional air flow, unidirectional vertical and
horizontal airflow. It will also show measurements of
the effect of heat sources in horizontal and vertical
air flow.
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Erdman Measurement Consulting
President
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Bob has over 40 years experience
in making sensitive measurements and managing related
projects, mainly at Keithley Instruments, the leading
manufacturer of very sensitive electronic measuring
instruments. He has designed the most sensitive Ammeter
and Voltmeter commercially available, advised many
scientists on difficult measurement problems and worked
with Scientists and Architects to design nanotechnology
buildings.
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| Presentation |
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Interactions between Nanomeasurements and Nanobuilding
Design |
The
building can limit the Experimenter's ability to make
sensitive measurements on nanostructures. A discussion
of ways to estimate interference and determine whether
shielding is needed and how good the shielding has to
be are presented, along with instrument characteristics
that impact this determination. Generally, electrostatic
shielding must be done at the experiment in any case and
the building does not impose a limit to measurement. Magnetic
interference is determined by loop area enclosed by current-carrying
wire. Building design can be more of a limit in this case.
Users and building designers must effectively communicate
with each other to understand the limitations of both
shielding at the experiment and the building, in order
to agree on acceptable levels of interference that will
permit nanomeasurements to be made.
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Grounding Needs of Instrumentation |
Why the "3rd pin" of the power plug is GROUND,
not a reference.
Filters and capacitance dump ac currents into this line.
Some equipment has ac power line current in this line.
Therefore the voltage with respect to the earth is different
at different points.
It can be volts away from the experiment ground
In general it is not quiet, thus transmits noise into
a grounded experiment.
Impact of this on the measurement
and instrumentation:
Discussion of CMRR, related to NMRR from my Wednesday
talk.
Calculation of CMRR errors, typical numbers
Quick review of coupling mechanisms from Wednesday:
If the shield is tied to a noisy ground, it becomes
an unwanted transmitter
A Reference Bus solves these problems.
How to handle it: rules for connecting
Tie to earth
Tie to building ground at point of earth connection
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National Institute of Standards and Technology
Division
Chief, Manufacturing Metrology Division
Manufacturing
Engineering Laboratory
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Dr. Teague is Chief of the Manufacturing
Metrology Division in the Manufacturing Engineering
Laboratory of the National Institute of Standards
and Technology.
At NIST since 1972, Dr. Teague
has designed, constructed, and used precision instrumentation
for ultra-high accuracy dimensional metrology of surfaces
and micrometer to nanometer-scale features. Beginning
with his metal-vacuum-metal tunneling work in the
1970's, he continued to work with such precision instrumentation
as scanning tunneling microscopes, atomic force microscopes,
displacement and phase-measuring interferometry, stylus
instruments, flexure stages, and light scattering
apparatus. Because the laboratory and building environments
were always factors in the ultimate performance of
these instruments, the subject of this workshop has
been an ongoing topic of great interest.
Dr. Teague is a member of the
American Society for Precision Engineering, has served
twice as the Society's President, and is a fellow
of the UK Institute of Physics. He served as Editor-in-Chief
of the international journal Nanotechnology for ten
years and is currently a member of the Editorial Board
of the journal. He holds a B.S. and M.S. in physics
from the Georgia Institute of Technology and a PhD
in physics from the University of North Texas. He
has authored or coauthored 70 papers, has presented
50 invited talks in the technical fields described,
and jointly with colleagues, has six patents. Dr.
Teague has received the Gold Medal, Silver Medal,
and Allen V. Astin Measurement Science Award from
the Department of Commerce, the Kilby International
Award by the Kilby Awards Foundation, and an IR-100
Industrial Research and Development Award for his
work.
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| Presentation |
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This introduction covers
the workshop motivations, goals and objectives as well
as general logistics. It also includes an overview of
the session topics and the general organization of the
sessions.
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During this session, we will present
and discuss entries for the technical survey that was
developed by the organizers and made available to all
speakers and attendees via the workshop’s website.
Developing and making available agreed upon technical
performance specifications for the important environmental
properties of workspaces in facilities for advanced
science and technology is one of the principal goals
for the workshop. Proposed entries in the tables
will be based on results from the survey, information
contributed during the workshop talks and dialog among
workshop participants. Included in the survey
are tables for temperature control, relative humidity,
atmosphere control and cleanliness, electrical power,
tilt stability and vibration levels of laboratory floors,
background acoustic noise levels in laboratories, and
background EMI & RFI levels in laboratories.
Four levels of specifications have been chosen for each
of the environmental properties: Class 1: the “standard”
laboratory; Class 2: the “clean room” laboratory; Class
3: the “atomic manipulation/measurement” laboratory;
and Class 4: the “high-accuracy metrology” laboratory.
Entries in the tables for each of the environmental
properties will represent both experience and knowledge
of what can be achieved and the performance levels required
for a specific application. The goal for this
session is to complete the survey and to allow time
for participants to present their points of view about
the proposed specifications.
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HDR
Architecture, Inc.
Senior
Vice President
Professional
Associate
Electrical Section
Manager
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Mr. Bechtol is a Senior Vice
President and a Professional Associate of HDR and
the Electrical Section Manager. He has over 23 year
of experience in the planning and design of lighting,
power and communication systems for laboratory, institutional,
health care and justice facilities.
Mr. Bechtol has designed laboratory
electrical systems for the Department of Defense and
the Food and Drug Administration. His university laboratory
experience includes Johns Hopkins, Duke, UNC and UVA.
At the National Institute of Standards and Technology
(NIST) Advanced Measurement Laboratory, Mr. Bechtol
developed a power distribution system to provide two
sources of clean isolated power to each lab to reduce
the effects of power disturbances from adjacent labs
and from building equipment including lights, elevators
and mechanical equipment. He is currently the lead
electrical engineer for the Purdue University Birck
Nanotechnology Center.
Mr. Bechtol received a
Bachelor of Architectural Engineering degree from
Penn State in 1979. In 1984, he received his Professional
Engineer's license. He is a member of the Illuminating
Engineering Society (IES) and the International Association
of Electrical Inspectors.
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| Presentation |
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Designing for Clean Power |
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The effects on sensitive
electronic equipment form external and internal sources
of power disturbances can be mitigated by the application
of various types of power conditioning equipment and/or
by varying the configuration of the power distribution
system in a way to provide clean power to the sensitive
equipment.
Transient voltage surge suppression devices, isolation
transformers, uninterruptible power supplies, generator
and other types of power conditioners can be used to
protect lab equipment from one or more different types
of power disturbances.
Varying the configuration of the power distribution
system can in itself improve power quality at the lab.
By applying power conditions at selected locations within
the distribution system, the quality of power can be
greatly enhanced.
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Systems Integration
and Competing Criteria |
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Ahmad Soueid, Dave Bechtol, Hal
Amick
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Acentech
Incorporated
Chief
Engineering Scientist
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After receiving his BSME degree
from Washington University in St. Louis, Dr. Ungar
worked for three hears on development of second-generation
atomic weapons at Sandia Corporation in Albuquerque,
NM. There he also attended the University of New Mexico,
from where he received his MS degree. Subsequently,
he served as instructor in mechanical engineering
at New York University while he pursued his doctoral
studies. He was awarded the degree of Doctor of Engineering
Science from NYU in 1957 and then was appointed assistant
professor. In 1959 he joined the renowned research
and consulting firm of Bolt Beranek and Newman, Inc.,
in Cambridge, MA, where he held several technical
and management positions until his retirement from
there in 1996 as Chief Consulting Engineer. Since
then he has been serving as Chief Engineering Scientist
at Acentech Incorporated in Cambridge, MA.
Dr. Ungar is a Fellow of the
Acoustical Society of America and served as that societys
President in 1992-93. He is a Life Fellow of the American
Society of Mechanical Engineers and held the chairmanship
of its Design Engineering Division in 1978-79. He
is a board-certified member of the Institute of Noise
Control Engineering, whose presidency he held in 1985,
and he is an Associate Fellow of the American Institute
for Aeronautics and Astronautics.
In addition to having published well over 200 technical
papers and more than a dozen chapters in handbooks
and monographs, Dr. Ungar has translated and revised
the book Structure-Borne Sound, which
is considered as a classic in its field. He has chaired
highly regarded short courses on Vibration Control
at the Pennsylvania State University for more than
twenty years and has lectured in these and numerous
other courses in the US, Sweden, France, Brazil, and
Australia.
The American Society of Mechanical Engineers awarded
him its Per Bruel Gold Medal for fundamental
contributions to noise and vibration control engineering
involving structural damping, vibration isolation,
and vibrations of complex structures, as applied to
aerospace vehicles, ships, machines, and buildings.
The Acoustical Society of America honored him with
its Trent-Crede medal for his important contributions
to our understanding of vibrations in complex structures,
the effects of structural damping, and the propagation
of structure-borne sound.
Dr. Ungar has consulted on vibrations of numerous
high-technology facilities, including nano-mechanics
and microbiology laboratories and installations for
advanced, optics, and astronomy research. He also
has served as consultant on facilities that require
high resistance to vibration-related damage or malfunction,
including the Presidents helicopter hangar and
various aircraft test cells. He has pioneered in the
development of what has become the standard method
for predicting footfall-induced vibrations in buildings
that house sensitive devices and has consulted on
vibration isolation of instruments, machinery, and
entire buildings.
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| Presentation |
Vibration Isolation at Building Level
(Vibration Control) |
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In order to discuss the process
of vibration control in advanced technology facilities,
one must have a rudimentary understanding of how vibrations
are characterized. This presentation will open with
a discussion of some of the vocabulary and quantities
associated with vibrations and their representation.
The basic quantities of sinusoidal vibrations will be
discussed, along with those associated with random and/or
impact excitation. Typical interior and exterior sources
are discussed, along with typical approaches to their
control.
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Colin Gordon and Associates
Vice
President, Technology Development
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Mr. Amick received a Bachelor
of Science in Civil and Architectural Engineering
from the University of Wyoming in Laramie, Wyoming,
a Master of Science. in Structural Engineering at
the University of California, Berkeley, California
and a Master of .Engineering. In Civil Engineering
from the University of California in Berkeley, California.
Mr. Amick works on problems related to structural
and soil dynamics, rail and transportation vibrations,
mechanical vibrations, and community or workplace
vibrations. He is experienced in signals processing,
finite element modeling and many aspects of structural
and soil dynamics. Hal Amick has worked extensively
in the design of low vibration environments for advanced
technology facilities.
Hal Amick joined Colin Gordon
& Associates in 1996, after spending eleven years
with Bolt Beranek & Newman and Acentech. Prior
to 1990, he worked closely with Colin Gordon at BBN.
At Colin Gordon & Associates he focuses on the
design and maintenance of low-vibration environments
for vibration-sensitive facilities used for research,
development and production of microelectronics as
well as those used for nanotechnology, optics research,
advanced physics and bioscience studies. His early
consulting work involved a wide variety of structural
settings, including nuclear power plant seismic analysis,
container crane design, and structural failure analysis.
Since 1993 he has served as vibration consultant for
design and renovation of laboratories at the National
Institute of Standards and Technology (NIST). Mr.
Amicks selected project experience includes:
Advanced Measurement Laboratory (NIST); M. D. Anderson
Cancer Research Center; Genentech Hall (Building 24),
University of California, San Francisco, Mission Bay
Campus;Knudsen Hall West, UCLA; Huntsman Cancer Research
Center, University of Utah; California Nano Systems
Institute, University of California at Santa Barbara;
Birck Nanotechnology Research Center, Purdue University;
P-050 Nano Science Research Laboratory, Naval Research
Laboratory; and Seagate Research Center.
Hal Amick has written and presented
many papers and reports, and has published extensively.
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| Presentation |
Isolating Instruments from Building Vibration
(Reducing Vibration Within the Building) |
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The
ultimate objective of the vibration engineer-when designing
buildings for advanced technology-is to protect vibration-sensitive
equipment from vibrations. In order to do this in an
economical manner, the engineer must
establish the vibration requirements of the items of
equipment that will be used. Not all instruments are
equally sensitive. The tests used to document vibration
sensitivity will be discussed, and this will lead to
a presentation of generic vibration criteria.
The first session discussed
means by which the designer controls vibrations within
the building system itself. In many cases, however,
it is desirable to reduce vibrations at the equipment
itself, using either external or internal vibration
isolation systems. Options are discussed for internal
vibration isolation systems-usually within the purview
of the equipment designer-as well as external isolation
systems-under the control of either the building designer
or the equipment user.
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Systems Integration
and Competing Criteria |
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Ahmad
Soueid, Dave Bechtol, Hal Amick
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Bartlett Consulting
Principal
Mr. Bartlett is
the Principal of Bartlett Consulting with over 35 years experience
in facilities engineering. He is currently the Quality Assurance
Manager for construction of NIST's $200 million Advanced Measurement
Laboratory (AML), responsible for ensuring the construction
contractor builds the AML in accordance with the very specialized
construction features specified in the contract. The AML is
designed to meet the stringent requirements of NIST's most
sensitive and critical laboratory programs in the areas of
temperature and humidity control, vibration isolation, air
cleanliness, electrical power quality and electromagnetic
interference. All of these requirements are being met on a
scale unlike any other in the world. All aspects of the construction
process and building trades contribute to the total finished
facility.
Prior to this project, Mr. Bartlett
was a civilian in the Naval Facilities Engineering Command,
serving in a series of management and leadership positions:
Director of Client Liaison for the Navy's $8 billion facilities
enterprise world-wide; Director, Facilities Acquisition
Directorate; Director, Interagency Construction Division;
Director, Navy Military Construction Division; and, from
1982 to 1987, Director of Program Management for the $2
billion, 10-year construction program to build a TRIDENT
Submarine base in Georgia. From 1978 to 1980, he was a Design
Engineer for the Smithsonian Institution, preparing plans
and specifications and managing Architect/Engineer contracts.
From 1967 to 1978, Mr. Bartlett was an officer in the Navy's
Civil Engineer Corps and had tours managing construction;
Seabee Company Commander in Viet Nam; various public works
jobs in Japan; and staff duty with the Strategic Systems
Projects Office in Washington, DC. After release from Active
Duty, he remained active in the Reserves, including a tour
as a Seabee Commanding Officer, and retired in 1997 as a
Captain, after 30 years of commissioned service.
Mr. Bartlett holds a Bachelor
of Science degree in Electrical Engineering, and a Master's
degree in Engineering Administration (Construction Management).
He is a registered Professional Engineer in Virginia. Mr.
Bartlett has served as Chairman, Research Committee; Chairman
Fully Integrated and Automated Project Process (FIAPP) Committee,
both of the Construction Industry Institute and Chairman,
Project Management Committee, of the Federal Facilities
Council (a consortium of over 20 federal agencies).
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| Presentation |
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Quality Assurance Considerations in Advanced Technology
Building Construction |
James
Barlett, Todd Snouffer
Constructing Advanced Technology Buildings takes special
forethought and focus to actually achieve what is required
to have them perform. Advanced Technology construction
requires special construction methods and rigorous attention
to details. This presentation will cover the emphasis
needed during the construction process and present some
lessons learned.
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National Nanotechnology Coordinating Office
Director
Naval
Research Laboratory
Head,
Chemistry Division
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Dr. James S. Murday received
a Bachelor of Science in Physics from Case Western
Reserve in 1964, and a Ph.D. in Solid State Physics
from Cornell in 1970. He joined the Naval Research
Laboratory (NRL) in 1970, led the Surface Chemistry
effort from 1975-1987, and has been Superintendent
of its Chemistry Division since 1988. From May to
August 1997 he served as Acting Director of Research
for the Department of Defense, Research and Engineering.
He is a member of the American Physical Society, the
American Chemical Society and the Materials Research
Society; and a fellow of the American Vacuum Society
(AVS), and the UK Institute of Physics. For the AVS,
he has served as trustee for 1981-1984, director for
1986-1988, representative to the American Institute
of Physics Governing Board 1986-1992, president for
1991-93, and representative to the Federation of Materials
Societies 1998-present.
His research interest in nanoscience began in 1983
as an Office of Naval Research program officer and
continues through the NRL Nanoscience Institute. He
has organized numerous International STM/NANO conferences
and their proceedings. Under his direction, both the
AVS and the International Union for Vacuum Science,
Technology and Applications created a Nanometer Science/Technology
Division. He is Executive Secretary to the U.S. National
Science and Technology Council's Subcommittee on Nanoscale
Science Engineering and Technology (NSET) and Director
of the National Nanotechnology Coordinating Office.
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National Institute of Standards and Technology
Chief,
Process Measurements Division
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Precitech, Inc.
Vice-President
of Engineering
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Since February of 2002, Jeffrey
W. Roblee has been with Precitech of Keene, New Hampshire
where he holds the position of Vice President of Engineering.
Precitech is a world leader in the design and manufacture
of ultra precision machine and metrology systems.
From 1977 to 1990, Dr. Roblee
held research positions at Lawrence Livermore National
Laboratory in California. There he developed ultra-precision
machine tools and measuring instruments for use in
optics fabrication. As part of this work, he was involved
in numerous facilities development for these devices.
His research work led to a 14 month assignment at
Phillips Research Laboratory in The Netherlands in
1986 and then to a research position at Carl Zeiss
in Oberkochen, Germany in 1990. As a member of the
Optical Process Development Laboratory, he led four
projects that improved the fabrication time, precision
and finish of optical components by more than a factor
of two.
In late 1993 he joined the Optical
Engineering Department at Polaroid Corporation in
Cambridge, Massachussetts. At Polaroid, Dr. Roblee
led a program to develop a laser print head for use
in making medical images and other purposes. In 1997
he received Polaroids title of Distinguished
Engineer and the Engineering Excellence Award from
the Optical Society of America in recognition of his
work on improving optical fabrication processes. Dr.
Roblee was named Technical Director in 1998 with responsibility
for three departments in Polaroid R&D: Model Shops,
CAD Technology Center and Concept Engineering. In
early 2001 he was chosen to lead the Optical Engineering
Department as well.
Dr. Roblee holds a number of
patents and has written numerous papers on temperature
control, machine dynamics, air bearing design, optics
fabrication and opto-mechanics. He is currently a
member of the American Society of Precision Engineering.
Jeffrey W. Roblee has a M.S. and Ph.D., both in mechanical
engineering, from the University of California at
Berkeley, 1979 and 1985. His B.S.M.E. is from the
University of Arkansas, 1978.
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| Presentation |
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Case Studies of Precision Temperature Control Systems
for Air Showers and Liquids at Lawrence Livermore National
Laboratory |
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The impact of temperature fluctuations
on the accuracy of machine tools and metrology instruments
has been recognized for some time. Many studies
have been done over the years, and thermal effects are
clearly the largest source of nonrepeatable error in
precision machine tools and measuring machines.
Consequently, Lawrence Livermore National Laboratory
has had numerous programs over the last forty years
to mitigate the effects of temperature. In this
talk, I will review some of the more important developments at
LLNL in precision temperature control. I will
discuss the principles that were used, and illustrate
them with some case studies. Systems have been
developed to precisely control the temperature of large
flows of oil, water and compressed gas. Seperate
means were also used to control air showers over individual
machines, but similar principles of temperature control
were used. Different implementations are
possible for doing precision temperature control, but
it was found that very high levels of precision were
possible at relatively low cost, if proper principles
were followed. Temperature control systems were
essential to the success of the Large Optics Diamond
Turning Machine at LLNL, and they will be one of the
case studies that will be discussed in detail..
It used 500 l/min of water which was controlled to +/-
0.0002 degrees C, and it used an air shower with 570
cubic meters per minute flow which was controlled to
+/- 0.002 degrees C for days at a time.
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National Institute of Standards and Technology
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Dr. Lawall came to NIST
as an NRC postdoctoral fellow in the Laser Cooling
and Trapping group in 1995. Since 1997 he has
been a staff member in the Quantum Metrology Group.
His current research work involves ultra-high accuracy
laser interferometry with stabilized CW lasers, and
frequency combs using mode-locked femtosecond lasers.
Dr. Lawall received his B.S. degree in physics from
Stanford University and his PhD in experimental atomic
physics from Harvard University. Prior to starting
his PhD work, he spent two years as a Peace Corps
volunteer in Mali, where he taught mathematics at
the Lycée de Segou and constructed energy-efficient
wood stoves. Following his doctoral degree,
he was a Chateaubriand postdoctoral fellow in Paris
at the Ecole Normale Superieure, where he was instrumental
in laser cooling a three-dimensional gas of atoms
to 180 nanoKelvin, the record temperature at that
time.
In his spare time Dr. Lawall plays the violin and
viola in chamber ensembles and enjoys whitewater kayaking.
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| Presentation |
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Acoustic and Vibration Control in Vacuum: A Case Study |
I will
present the approach of an experimental physicist to the
problem of control of seismic and acoustic disturbances
in a vacuum environment. I will start with a brief discussion
of vibration isolation by means of a passive resonant
system, illustrated with experimental data taken with
springs and elastomers. I will then show the vibration
level present on the floor of a good underground laboratory
environment, and the amount of suppression one achieves
with conventional optical tables. Next, I will show the
system we have built at NIST in order to prototype optical
interferometers in a high-vacuum environment. The environmental
isolation mechanisms are activated sequentially, in order
to illustrate the isolation achieved by each stage and
the compromises that some stages entail. This approach
helps to illustrate what fraction of the vibrations is
of acoustic origin and what fraction is seismic, and the
importance of controlling both is made manifest. Disturbances
are measured with both an accelerometer and a high-finesse
Fabry-Perot interferometer. One important conclusion of
this work is that the vibration imposed by a maglev turbomolecular
pump is easily controlled to the extent that it is unlikely
to contribute significantly to the ultimate vibration
of even a very quiet system.
It will be shown that our relatively simple system offers
vibration isolation not only vastly surpassing that
of a conventional floating optical table, but in fact
better than the ion-pumped NIST X-ray interferometer.
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Delphi
Delco Electronics Systems
Manager,
Contamination Control
|
John Weaver is the Manager of
Contamination Control at Delphi Corporation, Delco
Electronics Systems. He is responsible for a broad
spectrum of contamination control technology, from
cleanroom design and construction through all aspects
of cleanroom operation. In addition to direct responsibilities
within Delphis wafer fabs, John provides assistance
throughout the corporation and to several universities.
He draws on over thirty years of experience in contamination
control engineering as well as semiconductor process
and device development. John holds two patents, has
authored numerous technical papers, tutorials, workshops,
and a book on cleanroom design and construction. He
works with different organizations on the development
of contamination control educational programs and
juries technical papers prior to publication. The
recipient of multiple contamination control awards,
he has worked with several industry committees and
is a Principal Member of the NFPA 318 committee, Fire
Standard for Cleanrooms. John is a Senior Member of
the Institute of Environmental Sciences and President
of the Indiana Chapter.
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| Presentation |
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Achieving ISO Class 3 in a Retrofit Cleanroom - A Case
Study |
|
Over the past eighteen years,
there has been a major change in cleanliness requirements
for semiconductor cleanrooms and a corresponding change
in the design of cleanrooms to meet those requirements.
To achieve cleanliness levels of ISO Class 3 (formerly
Class 1 per Federal Standard 209E), a new cleanroom
is generally designed and constructed. In the case of
the Roland Project at Delphi Delco Electronics Systems,
a portion of a 1985-vintage Class 10 (Fed. Std. 209E)
cleanroom was modified to achieve the more stringent
requirements of ISO Class 3. This case study discusses
the design of the facility modifications and the implementation
of the construction project that achieved the cleanliness
goals for the cleanroom. Included in the project were
modifications to the air handling system and terminal
filters, upgrades to the utilities supplied to the facility,
modification of the bay-chase design of the cleanroom,
and the installation of an entirely new tool set. All
these were accomplished while maintaining production
in the adjacent Class 10 portion of the cleanroom, which
was in continuous operation. Also discussed are the
clean-construction protocols that were utilized during
the project and the final commissioning of the facility.
The project was completed successfully, meeting all
of the cleanliness goals without interruption of, or
cleanliness impact on, the adjacent production facility.
The cleanroom modifications were achieved on-time and
on-budget, and all product-cleanliness targets were
exceeded.
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National Institute of Standards and Technology
Physicist,
Electron Physics Group
|
Dr. Stroscio is a physicist
in the Electron Physics Group in the Physics Laboratory
of the National Institute of Standards and Technology.
He joined NIST in 1987 after completing a two year
post-doc at the IBM T. J. Watson Research Center where
he pioneered the development of scanning tunneling
microscopy and spectroscopy measurements with Randal
M. Feenstra. At NIST his research interests continued
in condensed matter physics with an emphasis on nanoscale
physics. His research has encompassed areas including
MBE growth of metal and semiconductor systems, nanoscale
magnetism, superconductivity, and atomic manipulation.
Dr. Stroscio has designed and constructed numerous
state-of-the-art scanning probe systems to accomplish
his research, including most recently, the design
and construction of the Nanoscale Physics Facility,
which contains one of the most advanced scanning probe
systems that operates in ultra-high vacuum, cryogenic,
and ultra-high magnetic field environments.
Dr. Stroscio received his PhD
degree from Cornell University in the area of surface
physics. He has authored or coauthored over 65 publications.
Dr. Stroscio has been elected to fellow of the American
Physical Society and the American Vacuum Society and
he has received the Arthur S. Flemming Award, the
Department of Commerce Silver Medal Award, and the
Sigma Xi Young Scientist Award for his work at NIST.
He has served on numerous committees of the American
Vacuum Society, and is serving on the Editorial Board
of Review of Scientific Instruments.
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| Presentation |
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Design and Operation of the Nanoscale Physics Facility
in the NIST Physics Laboratory |
The
Nanoscale Physics Facility in the NIST Physics Laboratory
contains one of the most sophisticated scanning tunneling
microscope systems for nanoscale physics research, and
posed a number of engineering challenges to meet its design
goals. The type of studies that are undertaken in this
system range from atomic manipulation of individual atoms
to create ideal nanostructures to spectroscopic studies
of the quantum properties of nanostructures. To accomplish
these studies a microscope system was designed and constructed
that operates in multiple extreme environments including:
ultra-high vacuum (10-11 Torr), low temperature (2 K),
and ultra-high magnetic fields (10 T). The design goals
included operating in these environments with imaging
and spectroscopic measurements with a tunneling vacuum
gap separation stable at the picometer level. The design
of the Nanoscale Physics Facility included combining the
tunneling microscope system with molecular beam epitaxy
systems, for versatility in nanoscale physics research
projects. In this talk I will discuss the challenges to
meet these design goals, including solutions to overcome
building environmental noise sources, as well as the design
details needed in operation of a scanning tunneling microscope
in these environments. Operation of the facility will
be highlighted from recent studies.
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National Physical Laboratory
Teddington, United Kingdom
Corporate
Director
|
Dr Julian B Hunt is a Corporate
Director of the National Physical Laboratory, with
responsibility for managing NPL scientist's input
to the 'design and build' of the new NPL building,
the overseeing, management and control of the move
from the present NPL buildings to the new building,
minimising disruptions to business activities wherever
possible, and for optimising the use of both the old
and new buildings during this transitional period.
Dr Hunt received a Batchelor
of Science in Physics from Queen Mary College, University
of London in 1963, and a Ph.D in Nuclear Physics from
the same University in 1967. He joined the National
Physical Laboratory in 1966, and led the Neutron Metrology
Group from 1974 until 1989. He developed a number
of different techniques and instruments for the accurate
measurement of neutron fluence over the neutron energy
range from 1 keV to 6 MeV. During that time he also
participated in a number of international comparisons
of neutron fluence measurements organised under the
auspices of the Bureau des Poids et Mesures (BIPM).
From 1989 to 1996 he was responsible for the formulation
of the Radiation Dosimetry programme at NPL and for
its delivery in order to meet the aims and objectives
of the National Measurement Policy Unit of the UK's
Department of Trade and Industry (DTI/NMSPU). In 1996
his responsibilities expanded to cover the full extent
of the DTI/NMSPU Ionising Radiation Programme, comprising
Radiation Dosimetry, Radioactivity and Neutron Measurements.
He continued in this role until November 1999 when
he join the NPL Executive Board as a Corporate Director
with responsibilities for coordinating NPL's input
to the design and build of the new NPL building, and
to maximising the benefits from occupying first class
laboratory facilities.
Dr Hunt has been a member of
a number of UK, European and international committees
concerned with the specification and characterisation
of neutron radiation fields. He has authored or co-authored
over 60 papers and has presented more than 30 papers
either as invited talks or as research papers, mainly
concerned with neutron metrology.
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| Presentation |
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Measurements of Temperature Stability and Uniformity in
Several Types of Laboratories |
Julian
Hunt, Bea Sennewald
This session will describe a series of temperature
measurements of laboratory spaces undertaken by scientists
at the National Physical Laboratory in the U.K.
It will show measurements of stability
and uniformity in laboratories with varying types of
air flow and varying degree of complexity in temperature
control design. The labs include spaces with low-velocity
non-directional air flow, unidirectional vertical and
horizontal airflow. It will also show measurements of
the effect of heat sources in horizontal and vertical
air flow.
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National Physical Laboratory
Teddington, United Kingdom
Director
of Science and Technology
|
Kamal Hossain is the Director
of Science and Technology at the National Physical
Laboratory, UK. After obtaining his PhD from Cambridge
University, Kamal has been involved in personal research
in the high temperature materials field, government
policy work in the UK Department of Trade and Industry
and various international activities. He has been
the Chairman of VAMAS the leading international
initiative in pre-normative R&D in the materials
field. He is also a member of the European Commission
Advisory Group for the new Framework programme for
Research and a Vice President of CEN STAR the
high level Working Group in CEN with the responsibility
of improving links between standardisation and research.
Currently Kamal is responsible for developing and
implementing the Laboratorys strategy for science.
This includes directing the development of programmes
and facilities.
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| Presentation |
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Science Needs for High Performance Laboratories |
| In
this presentation, NPL's priority areas for development
in measurement science for the future will be described
briefly. This will include fields such as nanotechnology,
quantum metrology, biotechnology and photonics. Potential
requirements for future laboratory facilities to achieve
our strategic plan for science will be discussed.
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Oak Ridge National Laboratory, High Temperature Materials Laboratory
Distinguished
Research Staff Member
|
Larry Allard obtained all three
of his degrees at the University of Michigan in the
Materials Science and Engineering Dept. He started
his EM career in 1963 as a sophomore at the U of M,
working as a research assistant in the High Temperature
Metallurgy group, where he studied microstructures
of stainless steel and nickle-based superalloys to
characterize creep-rupture failure mechanisms. In
1969, he joined the Materials Characterization group
at the Oak Ridge Gaseous Diffusion Plant, where he
worked on materials problems related to uranium isotope
separation for two years before returning to Michigan
to help establish the universitys Electron Microbeam
Analysis Laboratory. After working in the chemical
industry for American Cyanamid Company in Stamford,
CT for 2 years, in late 1986 he returned to Oak Ridge,
and is now a Distinguished Research Staff Member in
DOE's High Temperature Materials Laboratory, a National
User Facility located at Oak Ridge National Laboratory.
His current research involves studies of structural
ceramics, ion-implantation for surface modification,
nanophase composite materials, catalytic materials,
and instrumental developments involving electron holography,
digital imaging and remote instrument operation. He
is the author or co-author of more than 170 journal
articles, and has co-edited several conference proceeding
and books, including the first definitive textbook
on electron holography, Introduction to Electron
Holography, published by Plenum/Kluwer in 1999.
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| Presentation |
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The Aberration Corrected Electron Microscope (ACEM) at
ORNL |
The Advanced Materials Characterization
Laboratory (AMCL): The presentation will cover the design
of the laboratory and its purpose. The Aberration Corrected
Electron Microscope (ACEM) coming to the HTML and several
other microscopes being developed for ORNL will require
a very special environment in order to reach their design
resolution. Electromagnetic fields, mechanical vibration,
noise, room temperature fluctuations, and barometric pressure
changes all have the ability to degrade microscope performance.
The ACEM, for example, will need to have ambient electromagnetic
fields below 0.3 milligauss; nowhere in the existing HTML
building is the field below 1 milligauss. The AMCL will
be designed to minimize all potential deleterious environmental
influences. The ACEM will be housed "room within
a room," and will be operated from an adjoining control
room. Thus there will be no operator with the instrument,
which will minimize noise and thermal fluctuations. |
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VitaTech Engineering, LLC.
President
and Chief Engineer
| As
President & Chief Engineer, Mr. Vitale delivers
EMF lectures and presentations to school districts and
corporations regarding perceived threat and public health
issues, presents professional EMF training seminars,
performs EMF surveys, designs shielding/cancellation
systems and directs research activities. He has established
a working relationship with federal agencies (EPA, FCC,
DOE, NIESH) responsible for EMF health and policy issues.
Besides his EMF expertise, Mr. Vitale has more than
20 years of program management, systems engineering,
software development and electronic design experience
in several other technical disciplines including biomedical
engineering; military command, control and communications
systems (C3S); and, broadcast television systems.
During his career, Mr.
Vitale has held senior technical management positions
with Booz Allen & Hamilton in Washington,
D.C., National Broadcasting Company (NBC) in New York
City, UNISYS in New York and Mercury Middle East in
the United Kingdom and Kuwait. As President of a biomedical
research and development company, he invented and
designed a battery powered, portable, microprocessor
controlled electrocardiograph (ECG) monitor called
the VitaScope. Mr. Vitale has a B.S.E.E. in electrical
engineering from the University of Florida and a B.S./BA
in biochemistry and medieval history from the State
University of New York at Stony Brook. He has an inactive
Top Secret clearance and published numerous EMF articles
and technical papers.
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| Presentation |
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EMI/RFI: cause; site analysis; building evaluations; mitigation
solutions |
|
Electromagnetic interference (EMI)
affects various types of laboratory equipment, which
are becoming more and more sensitive to extremely low
frequency (ELF) and radio frequency (RF) interference.
Electron microscopes manufacturers are typically specifying
that the ambient AC magnetic fields near the microscope
not exceed 1.0 mG.
Conducting a field survey at the
proposed site to record ambient electromagnetic fields
is essential in understanding the initial site conditions.
Meeting with users and surveying their existing laboratories
provide significant feedback into the establishment
of design criteria for the new laboratory spaces.
With good preplanning, many of
the common EMI sources found in a laboratory building
can be located away form the laboratory spaces. Where
EMI sources are required in or near the lab as part
of its basic operation, a mixture of shielding techniques
using various construction materials and methods along
with actual shielding materials can be provided to maintain
the necessary environment. Computer simulations can
be preformed to verify proposed laboratory and building
configurations.
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HDR Architecture, Inc.
Director
Of Advanced Technology
|
Mr. Jamison is a Vice President
with HDR focused on advanced technology facilities.
He is a registered Professional Engineer with more
than 20 years of experience in the design and management
of projects for state-of-the-art technically advanced
facilities. After graduating from Iowa State University
with a Bachelor of Science in Mechanical Engineering,
Mr. Jamison has spent his career developing the technical
design expertise in Mechanical and HVAC systems, as
well as Process and Piping for semiconductor facilities,
microelectronics facilities, laboratories, research
facilities, manufacturing, data centers, and offices
and other projects for corporate, governmental and
educational clients. He also has construction experience
in cleanroom fabrication, cleanroom protocol and tool
installation, and has managed numerous design projects
including major tool ramps, fab renovations and greenfield
fabs.
As a Project Principal Mr.
Jamison has led successful project teams both domestically
and abroad. He is currently the Project Principal, overseeing
the overall management, coordination and client satisfaction
for several major projects at HDR. He provides a communication
linkage with clients at a top level of authority capable
of direct and expedient action with the necessary knowledge
of the facility type to ensure proper commitment and
utilization of resources. He currently serves a Project
Principal for the Purdue University’s Birck Nanotechnology
Research Center in West Lafayette, Indiana. This
project will provide180,000 SF interactive, interdisciplinary
laboratory, cleanroom, office, teaching laboratories
and seminar space to pursue research in nanoscale applications.
He is also the Project principal for Sandia National
Laboratories Center for Integrated Nanotechnologies
(CINT) Core Facility. CINT will be a new, state-of-the-art
nanoscale science research center jointly operated by
Sandia National Laboratories (SNL) and Los Alamos National
Laboratory (LANL). Other relevant projects in Mr. Jamison’s
portfolio include a 300mm Wafer Fab with Class 100 Process
Areas, Vibration Sensitive Processes and Temperature
Control of +/- 2°F for Micron Technologies; 15,525 SF
Class 100 Cleanroom, 200mm Wafer Fab and Tool Install
for a confidential client; 260,000 SF MOS 12 South Fabrication
Plant and MOS 12 East Fabrication Plant, iMOS Expansion
for Motorola; and 150,000 SF Manufacturing / Test &
Assembly Facility including 25,000 SF of Class 10,000
Cleanroom for LSI Logic. |
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| Presentation
Synopsis |
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300mm Wafer Fab Contamination Control |
|
This presentation will discuss
the characteristics of a 300mm wafer fab for industry
and how the requirements of this facility type relate
to other buildings for advanced technology. Specific
contamination issues are identified and cleanroom solutions
are outlined to address these issues. The presentation
also reviews how evolving semiconductor technology has
affected the design of the cleanroom environment and
where future technology will lead us.
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Massachusetts Institute of Technology
Principal
Research Scientist, Center for Space Research (MIT)
Director, Space
Nanotechnology Laboratory
Associate Director,
NanoStructures Laboratory
Senior Research
Staff, Microsystems Technology Laboratories
|
Dr. Mark L. Schattenburg is
a Principal Research Scientist in the MIT Center for
Space Research. He is Director of the Space
Nanotechnology Laboratory, Associate Director of the
NanoStructures Laboratory and Senior Research Affiliate
with the Microsystems Technology Laboratories.
His principal work has been in the area of micro/nanofabrication
technology, optical and x-ray interferometry, x-ray,
electron-beam and other advanced lithographies, nanometrology,
x-ray optics and instrumentation, x-ray astronomy,
high-resolution x-ray spectroscopy, and space physics
instrumentation utilizing nanotechnology. His
research group is a world leader in nanometrology
research. His lab has also developed nanotechnology
for a number of NASA missions and advanced lithography
technology that has been licensed to numerous semiconductor
manufacturers around the world. He sits on the
Steering Committee of the International Conference
on Electron, Ion and Photon Beam Technology and Nanofabrication,
serving as Program Chair in 2003.
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| Presentation |
|
Environmental Enclosure for the MIT Nanoruler |
| M.L.
Schattenburg, P. Konkola, C. Joo, and C.H. Chen
The Nanoruler is a novel metrology
and grating writing/reading system that is designed
to rapidly pattern large gratings with a pattern distortion
approaching 1 nm, some 100X smaller than current technology.
These patterns are intended to be used for the metrology
of nanoelectronic and opto-electronic patterns. It performs
this task by utilizing a technique called scanning beam
interference lithography, invented in our laboratory.
This method is a hybrid of holographic patterning and
ruling, combining the best features of both. The accuracy
of the resulting grating is critically dependant on
the accuracy of the high-performance air bearing stage,
and this is limited primarily by the laser interferometer.
The accuracy of the interferometer, in turn, is overwhelmingly
dominated by atmospheric disturbances such as temperature
and pressure fluctuations. For the Nanoruler we needed
an environmental chamber with stringent control of temperature,
pressure, humidity, vibration and acoustics. Working
with a vendor we have completed and are testing a chamber
that we hope will meet our needs. We will report on
why these levels of control are required and preliminary
data on chamber performance.
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EPRI PEAC Corporation, Semiconductor and Industrial PQ Group
Engineering
Manager
|
Mr. Stephens leads the
semiconductor and Industrial power quality group at
EPRI PEAC Corporation. He works extensively on resolving
power quality problems in all industrial sectors including
semiconductor manufacturing. As the project engineer,
Mr. Stephens led the EPRI Task 24 research that helped
foster the SEMI F47 standard. He participated in the
SEMI power quality standards task force from its inception
to the end of the effort and the passage of the SEMI
F42, F47, F49, and F50 standards. He has over fourteen
years of professional experience including instrumentation
and control systems engineering and power quality
solutions. His design experience includes instrumentation
specification, control system integration, and equipment
installation and startup. In 1995, his research into
computer tolerance of electrical disturbances helped
to inform the revised CBEMA curve for voltage tolerance
of information technology equipment. A Registered
Professional Engineer, Mr. Stephens received a B.S.E.E.
from the University of Tennessee. He has participated
in or directed power quality related work for Alcatel,
Applied Materials, ASM Europe, Axcelis, Carrier, CFM
Technologies, Confidential Sites (Singapore), CTI,
Dunham-Bush, ESI, Exxon Mobil Chemical, Ford Electronics,
FSI International, GE Glass, Genentech, GM, Hewlett
Packard, IBM, International Rectifier, KLA-Tencor,
Lambda EMI, LSI Logic, LWD, Motorola, Novellus, Philips
Semiconductor, PP&G Industries, Pratt & Whitney,
Reliability, Inc., Rudolph Technologies, Schlumberger,
SEMATECH, Sony Picture Tube Manufacturing, Sony Semiconductor,
Square D, ST Microelectronics, SVG Lithography, SVG
Thermco, Tokyo Electron, Toyota, Trane, Varian Semiconductor
Equipment Associates, Inc., Winbond, and York.
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| Presentation |
|
Cost-Effective Power Conditioning for Advanced Technology
Buildings |
|
The most common type of
electrical disturbance that is detrimental to high tech
manufacturing is the voltage sag. This presentation
will discuss the use of new battery-less technologies
to enable NANO building facility and process systems
to be more robust to voltage sags. The presentation
will discuss the electrical environment in the United
States, the common reasons why process and facility
equipment is vulnerable to voltage sags, and what can
be done to make more robust systems. The relevance of
the semiconductor industry power quality immunity standard
SEMI F47-0200 will be discussed as well. Special emphasis
will be given to designing systems that have built-in
immunity to voltage sags such that the use of expensive
large scale power conditioning can be minimized.
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Colin Gordon and Associates
President
|
Michael Gendreau received
his Baccalaureate in Physics from the University of
California (Santa Cruz) and M.A. from Mills College
in Composition (Electronic Music and Recording Media).
Gendreau has been with Colin Gordon & Associates
since 1993, where he currently serves as President
and Senior Consultant. Prior to joining Colin Gordon
& Associates, he was employed for three years
as a vibration and acoustic engineer with Response
Dynamics of Oakland, California. He specializes in
facility interior vibration and noise control (including
the analysis of HVAC and building mechanical systems);
structural dynamic testing; machinery vibration isolation;
room acoustics; environmental noise studies using
computer models; and site studies, including the measurement
of environmental vibration and noise, interpretation
of local noise regulations and building noise and
vibration design criteria; and preparation of environmental
impact and design feasibility reports. He is a Board
Certified Member of the Institute of Noise Control
Engineering, and a member of the Society for Experimental
Mechanics, Acoustical Society of America, and the
Audio Engineering Society. He has managed and/or acted
as a technical resource for a variety of projects
related to research, nanotechnology, and semiconductor
production. His clients have included Intel (U.S.,
Europe, Israel), Motorola, Taiwan Semiconductor Manufacturing
Corporation (TSMC), Stanford University, and the University
of California at San Francisco. Current or recent
nanotechnology projects include National Nano Devices
Laboratories (Taiwan), LBNL Molecular Foundry (California),
Center for Integrated Nanotechnology Core Facility
(Arizona), AZ Biodesign Institute (Arizona), National
Physical Laboratory Advanced Measurement Laboratory
(UK), Argonne National Laboratories Center for Nanoscale
Materials (Illinois), and others.
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| Presentation |
|
Building Design for Advanced Technology Instruments Sensitive
to Acoustical Noise |
|
High technology research
and manufacturing instruments respond to internal vibration
that can be excited by the external acoustic environment.
The degree to which this occurs depends on many factors,
but primarily the correspondence between the resonance
characteristics of the instrument and the frequency
content of the acoustic environment in which it operates.
Adverse acoustic environments, such as those often found
in operating laboratories, can affect the threshold
of resolution achievable by the instrument. This presentation
will include:
· a review of the basic terminology and criteria used
in the acoustical design of advanced technology facilities,
· discussion of the mechanisms by which acoustic noise
can interfere with instruments, and
· details of what the building contributes in terms
of sources of noise (internal and external) and protection
from those sources.
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Earl Walls Associates
Principal
|
In his over 30 years of experience
Mr. Somin has gained a comprehensive understanding
of Master Planning, Programming, Laboratory Design
Development (Program Drawings), Construction Techniques
and Construction Documents. His administrative and
design experience with a broad spectrum of laboratory
types, as well as a keen awareness of professional
performance standards, assures the creativity, coordination
and the attention to detail required to meet the high
standards of all EWA projects.
As Principal, Mr. Somin has
completed projects for Industry and Universities alike.
Dedicated to research and teaching, these facilities
encompass various disciplines including Biology, Chemistry,
Pharmaceutics, Medicine, Engineering, Metrology, Nanotechnology,
Animal Facilities, Electronics and many more.
As either Principal or Project
Manager, Mr. Somin has participated in many of EWA's
most highly acclaimed state-of-the-art facilities
including the following award winning Research &
Development Magazine Lab of the Year Competition projects:
Ciba-Geigy Pharmaceutical Life Sciences Building,
Armour Research Center, Aerospace Corporation Ivan
A. Getting Laboratories, and the Squibb Institute
for Medical Research. Mr. Somin has served on the
Space Planning Advisory Board for a large International
Pharmaceutical Company, and continues to lecture at
numerous research symposiums.
Michael Somin received his Bachelor
of Architecture at the University of Illinois in 1962.
Prior to joining Earl Walls Associates in 1966, Mr.
Somin served as Project Architect on many Educational
and Commercial projects for Holabird & Root Architects
in Chicago, Illinois. Mr. Somin holds an Architect's
license in numerous states, and is a current member
of the American Institute of Architects and NCARB.
Currently, Mr. Somin is working
on projects for the University of California, Lawrence
Berkeley National Laboratory; University of Alaska,
Anchorage; Manchester College; Pomona College at Claremont;
and the Nano Science Laboratory for the United States
Navy.
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| Presentation |
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Organic and Chemical Contamination in Advanced Laboratories
|
|
The discussion will be organized
around the theme of chemical contamination as it relates
to biological investigations in an Advanced Technology
Facility. We will investigate the challenges of combining
BSL-3 or BSL-4 units within high tech cleanrooms. Can
the positive pressure and recirculated air requirements
of cleanrooms work with the negative pressure and exhausted
air needs of biocontainment facilities? We will explore
the requirements and outline some possibilities.
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Consultant
- Instructor
|
Ralph
Morrison graduated
in Physics from Cal Tech and received his MS in EE
from the University of Southern California. In his
early career he designed and manufactured instrumentation
for the aerospace industry. This gave him an understanding
of how to process very low-level signals over very
long distances and maintain signal integrity. This
led to his first book in 1967 on grounding and shielding.
His physics backsground led him into teaching and
consulting in all aspects of interference. He has
written 10 books all on the subjects of grounding,
interference and signal processing.
His latest book, titled The Fields of Electronics,
shows the reader how to use conductor geometry to
contain and limit interference. His full biography
is listed at his web site: RalphMorrison.com
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| Presentation |
|
Why all the Noise about Grounding? |
|
A very short history of grounding.
Why it is necessary in a facility. The difficulty in
using circuit theory to explain facilities, power grids,lightning
and other electrical activity. The semantics difficulty.
The politics of grounding. Why are there so many divergent
views? What is interference and how does it propagate
and couple? What are the explanations of how interference
enters equipment and modifies signal patterns? What
can be done in a facility to make it easier for end
users to effectively operate their hardware? When does
the problem become the domain of the hardware designer?
What are the solutions that help and what are the solutions
that cost money and do very little.
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Technical
Manufacturing Corporation (TMC)
Product
Manager, Active Isolation Systems
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Mr. Horning received a Bachelor
of Science in Aeronautical Engineering from California
State Polytechnic College in San Luis Obispo, California.
He then joined Northrop Aircraft where he designed
vibration test equipment and conducted vibration tests
on aircraft components. He then joined Thiokol
Chemical Corporation where he participated in the
design of a large vibration test facility for large
rocket motors.
Mr. Horning joined Barry Controls
in 1964 where he first worked with low natural frequency
passive pneumatic vibration isolation systems for
vibration test equipment. He then worked on
the design and application of pneumatic isolation
systems for the isolation of precision laboratory
and measuring equipment from seismic level floor vibration.
Applications included laboratory equipment such as
electron microscopes, atomic force microscopes; measuring
equipment such as coordinate measuring machines of
all types; and microelectronic manufacturing equipment
such as steppers. He was later involved in
the development and application of an electro-pneumatic
active vibration control system and a stiff piezo
based active vibration control system.
Mr. Horning joined TMC
in 1998 where he continued with the development and
application of active vibration control systems for
precision equipment. He often uses seismic accelerometers
or geophones and a Dynamic Signal Analyzer to determine
the vibration environment and to measure the isolation
provided by a passive or active vibration isolation
system.
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| Presentation |
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Latest Vibration Isolation Techniques at Instrument Level
Quiet Tables and New Technologies |
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The presentation will discuss
passive isolation systems including very low stiffness
mechanical and pneumatic isolation tables. Active vibration
isolation systems including soft electro-pneumatic and
stiff piezo electric systems will also be presented.
The advantages and limitations of each type of isolation
system will be presented. The need for a well damped
platform between the isolation system and the instrument
will be shown. The use of isolation systems with instruments
having an internal isolation system will also be discussed.
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Purdue University
Professor
of Physics
Ron
Reifenberger is currently a professor of Physics at
Purdue University and a member of Purdue’s Center for
Sensing Science and Technology. He received his undergraduate
degree in Physics from John Carroll University in 1970,
his PhD in Physics from the University of Chicago in
1976. He joined the Physics faculty at Purdue in 1978
following a two-year post-doctoral appointment in the
Physics Department at the University of Toronto. He
has received the Distinguished Alumni Award from John
Carroll University in 1992, is on the Editorial Board
of the Journal of Nanoscience and Nanotechnology, and
has been a Conference Co-organizer of the European Trends
in Nanotechnology 2001 and Trends in Nanotechnology
2002 Conferences. He recently participated in the international
APEC Foresight Committee entitled Nanotechnology, The
Technology for the 21st Century. He has co-authored
~130 refereed publications and three US patents.
Since 1986, Reifenberger’s scanning probe group has
been active in furthering inter-disciplinary nanoscale
research at Purdue by establishing collaborations with
faculty from the Chemistry, Electrical Engineering,
Chemical Engineering and Mechanical Engineering Departments.
His group has focused on research problems that emphasize
the role of scanning probe microscopy (SPM) as one of
the key enablers of nanotechnology. His current research
is focused on non-linear dynamics of SPM cantilevers,
micro patterning of substrates for the rapid detection
of targeted bacteria, and fundamental measurements related
to current flow in molecules, carbon nanotubes and Au
nanocluster networks. This work is currently supported
by grants from ARO, NSF, DOE, NASA and NAVSEA. |
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| Presentation |
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Debugging Acoustical Interference; Is it from the Building
or the Tool? A Case Study |
| S.
Crittenden, G. Pszota and R. Reifenberger
Scanning Probe Microscopes (SPMs)
are essential tools in the investigation of many nanoscale
phenomena. It can be argued that these microscopes have
been instrumental for the rapid spread of nanotechnology
throughout the world. These proximal probe microscopes
have vertical resolutions approaching 0.001 nm and are
capable of topographically imaging individual atoms
on clean, flat surfaces. As such, SPMs demand a high
degree of isolation from acoustical building noise and
vibration for proper operation. It is common practice,
when using these instruments, to blame excessive noise
on a variety of causes related to the surrounding environment.
We will describe a number of case studies performed
in our laboratory to discern whether noise encountered
in the operation of SPMs are related to building problems
or to shortcomings in the design and construction of
the instrument itself. A number of simple techniques
will be discussed that help to answer this question.
We conclude that many simple things can and will go
wrong when using a precise instrument like an SPM, even
though it may be housed in a multi-million dollar state-of-the-art
nano building.
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National Institute of Standards and Technology
Mechanical
Engineer, Building Environment Division
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Dr. Treado is a Mechanical
Engineer in the Building Environment Division, involved
inlaboratory and field testing, along with computer
an analytical studies, related to building thermal
and energy performance. He first came to the Center
for Building Technology as a summer student in 1973,
and returned following graduation in 1974. His current
research activities include developing and refining
test procedures for lighting and plumbing equipment
in support of the DOE Appliance Standards program.
He also developed and executed a detailed evaluation
of the NIST ATL Temperature Control Module, including
verification of thermal conditions and control system
performance. His research activities include lighting
and HVAC system performance, lighting test procedures,
the measurement and modeling of the interactions between
lighting and HVAC systems, and illumination conditions
and task visibility. He has developed, built and operated
a test facility for studying the interactions and
illumination conditions, and a laboratory for lighting
component interactions.
Other research activities have involved the role and
impact of fenestration on building energy performance.
He has developed and operated the NBS Daylight Laboratory
to evaluate the daylighting effects of fenestration
systems, and dynamic sky conditions. He has developed
a state-of-the-art automated microcomputer data acquisition
and analysis system, which is used to process a large
array of measurement parameters on a continuos basis,
and designed and built a window calorimeter. The NBS
Daylight Availability Database has been published
based on these measurement data. In carrying out his
duties as project leader, he prepares proposals, develops
the experimental plans, designs, constructs and installs
experimental apparatus and equipment, collects, reduces
and analyzes data, and prepares technical reports
describing the results. The results of his technical
work have been incorporated into IES recommended practices
for daylighting design, GSA guidelines for solar shading
system utilization and ASHRAE standards for measurement
of the solar-optical properties of materials, as well
as the ASHRAE Handbook of Fundamentals, and the IES
Lighting Handbook.
He has presented the results of his work to national
organizations
such as ASHRAE and the Illuminating Engineering Society
(IES), and has
published over 50 papers in the technical literature.
He is a member of IES and participates on the IES
Daylighting Committee and Testing Procedures Committee,
and is an associate member of ASHRAE, and a member
of TC 4.5 Fenestration Committee. He was awarded the
Taylor Technical Talent Award for outstanding applications
paper by IES in 1992, and the 1995 Crosby Field Award
for the best ASHRAE paper published in 1994.
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| Presentation |
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The NIST Temperature Controlled Laboratory Module |
| Prior
to the development of the plans and specifications for
the NIST Advanced Measurement Laboratory, a full-scale
test module was built, tested and evaluated to assist
in the design development and proof-of-concept of the
HVAC and control systems for the high-accuracy temperature
control laboratory spaces. This presentation will discuss
the results of the evaluation and the lessons learned. |
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HDR
Architecture, Inc.
Senior Vice
President
Senior Professional
Associate
Ted Zsirai is a Mechanical
Section Manager, Senior Vice President and Senior
Professional Associate of HDR Architecture, Inc. He
has over 25 years of experience in HVAC systems design.
Teds career with HDR started in 1975, in Omaha,
Nebraska. He has worked in HDRs Alexandria,
VA office since 1982 where his responsibilities have
included the design of complex engineering systems
for laboratories, courthouses, hospitals, and other
high technology facilities.
The King Abdulaziz University in Jedda, Saudi Arabia
included over 5,000,000 square feet of health science
center, research laboratories, and other academic
facilities. The campus is served by a 36,000-ton chiller
plant that was the largest indirect air-cooled plant
in the world at the time of its construction. Working
for Ellerbe Becket in their Washington, DC office
as chief mechanical engineer, Ted was responsible
for two major building projects for the General Services
Administration. The 1,700,000 square feet National
Archives II facility in College Park, Maryland featured
a low temperature and low humidity environment coupled
with the ultimate in air filtration. Ted was also
responsible for the conceptual design of the mechanical
systems for the Ronald Reagan Building, the second
largest public building in the Metropolitan Washington,
DC area.
His recent high technology projects at HDR include
the engineering systems design for the Advanced Measurement
Laboratory at the National Institute of Standards
and Technology in Gaithersburg, Maryland. This building
is considered one of the most technologically advanced
in the world, and will feature the most modern and
extensive nanotechnology facility in existence. No
existing laboratory combines the features of close
temperature control, vibration isolation, air cleanliness,
and power quality into a facility of this magnitude.
Ted was responsible for developing HVAC systems to
control the temperature within +/- 0.01 °C and
humidity within +/- 1% accuracy. He has recently served
as technical consultant to the United Kingdom's Department
of Trade and Industry in developing high accuracy
temperature controls for the National Physical Laboratory,
and at this time he is leading the mechanical systems
design for the Purdue Universitys Birck Nanotechnology
Center in Lafayette, Indiana.
He received his first diploma in 1966 in Mechanical
Engineering. In 1972, he graduated from the Budapest
Technical University, receiving his Master of Science
Degree in Building Mechanical Engineering. He has
been a member of ASHRAE since 1976.
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| Presentation |
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HVAC Design for Nanotechnology Buildings |
| Nanotechnology
facilities present unique design challenges for the HVAC
engineers. These buildings require precise temperature
and humidity control, a high level of cleanliness, and
absence of vibration. In certain areas, the requirement
of temperature control can be as high as ±0.01
°C accuracy with humidity maintained within ±1.0%.
This talk will focus on the issues of HVAC design in nanotechnology
facilities with emphasis on high accuracy temperature
control. |
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AdvanceTEC,
LLC
Managing
Partner
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Tim Loughran is Managing Partner
for AdvanceTEC, LLC in Richmond, VA. AdvanceTEC is
a design/build firm specializing in the construction
of cleanrooms, wafer fabs, and process systems for
the microelectronics and semiconductor industries.
Tim was formerly the Manager of Design/Build Services
for Performance Contracting, Inc. and Division Manager
for the Cleanroom Engineering Division of Cleanroom
Products. He has over 20 years experience in the cleanroom
industry and has published papers on numerous subjects
including Clean Packaging Technology, Fan Filter Evaluation,
Air Shower Performance, Retrofitting Cleanrooms, and
Design/Build Cleanroom Specification and Proposal
Evaluation. He is a frequent contributor to CleanRooms
Magazine and speaker at the CleanRooms conferences,
and former president of his local chapter of the IEST.
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| Presentation |
Matrix Development - A Prerequisite for a Successful Cleanroom
Design
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One
of the most serious and common mistakes made in the design
of cleanroom facilities is starting design before all
the requirements have been identified. Properly executed
programming and planning provide the most reliable foundation
for a successful cleanroom design and construction project.
Programming, a term utilized in the design community to
make information gathering look more attractive to team
participants, develops the body of information needed
to identify, clarify, and prioritize the cleanroom requirements.
This program will discuss the cause and effect of improper
programming on the design of a microelectronics facility.
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Purdue University
Manager,
Solid State Devices and Materials Laboratory
School of Electrical and Computer
Engineering
| Tim
Miller received his BSEE from Purdue University 1979,
23 years experience in Solid State research, the last
13 years as Manager of the Purdue University Solid State
Devices and Materials research facility, which currently
serves over 100 users. Responsible for installation,
maintenance, repair and user training on tools such
as Pattern Generator, Ion Implanter, MBE, sputter deposition,
e-beam evaporation, thermal evaporation, oxidation and
diffusion furnaces, and the Type 1 DI water system.
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| Presentation |
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EMI Issues in a University Microelectronics/Nanotechnology
Laboratory |
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This
presentation will present a case study of a laboratory
in which stray magnetic fields led to serious performance
degradation in an electron beam lithography system,
used for high resolution patterning of prototype devices.
In this system, proper operation requires an ac magnetic
field level below 3 milligauss. The procedures
used to determine the source of the interference and
how the problem was corrected will be described.
The second part of the talk will describe issues related
to the design of the Birck Nanotechnology Center.
Specifically, we will discuss EMI related design concerns
and describe the design approaches that have been adopted
in order to minimize EMI effects, both from the building
utilities and from other pieces of scientific equipment.
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National
Institute of Standards and Technology
Mechanical
Engineer
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Todd Snouffer is the Deputy
Project Manager for the construction of NIST’s new
Advanced Measurement Laboratory (AML) and, since 1993,
has seen the project through its planning, design,
procurement, and construction stages. As the Contracting
Officer’s Technical Representative for the Architect/Engineer
design and consulting services contracts for NIST
major facilities programs, he has gained invaluable
insight into advanced technology research facilities.
Mr. Snouffer’s knowledge of the NIST facilities infrastructure
and scientific community has enabled him to provide
a highly technical approach to meeting the stringent
demands of NIST’s most technologically advanced scientific
programs.
In his current position, Mr.
Snouffer provides detailed technical oversight in
such diverse areas as advanced temperature control
systems, vibration isolation, laboratory HVAC and
plumbing systems, fire protection, building commissioning,
and storm water management. In 1996, Mr. Snouffer
led a team of contract and Government personnel in
the development of the NIST Temperature Control Research
Project, laying the groundwork for the 48 High Accuracy
Controls laboratories currently being installed in
the AML facility.
Mr. Snouffer received
his Bachelor of Science in Mechanical Engineering
from George Washington University in 1991. He is a
licensed professional engineer in the State of Maryland.
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| Presentation |
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Quality Assurance Considerations in Advanced Technology
Building Construction |
James
Barlett, Todd Snouffer
Constructing Advanced Technology Buildings takes special
forethought and focus to actually achieve what is required
to have them perform. Advanced Technology construction
requires special construction methods and rigorous attention
to details. This presentation will cover the emphasis
needed during the construction process and present some
lessons learned.
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