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Speaker:
Ted
Zsirai, PE
HDR
Architecture, Inc.
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Nanotechnology facilities
present unique design challenges for the HVAC engineers. These
buildings require precise temperature and humidity control,
a high level of cleanliness, and absence of vibration. In certain
areas, the requirement of temperature control can be as high
as ±0.01 °C accuracy with humidity maintained within
±1.0%. This talk will focus on the issues of HVAC design
in nanotechnology facilities with emphasis on high accuracy
temperature control.
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Speaker:
Bea
Sennewald
HDR Architecure Inc.
Julian
Hunt
National Physical Laboratory
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This session will describe
a series of temperature measurements of laboratory spaces undertaken
by scientists at the National Physical Laboratory in the U.K.
It will show measurements of stability and uniformity in laboratories
with varying types of air flow and varying degree of complexity
in temperature control design. The labs include spaces with
low-velocity non-directional air flow, unidirectional vertical
and horizontal airflow. It will also show measurements of the
effect of heat sources in horizontal and vertical air flow.
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(presentation
not available)
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Speaker:
Jeff
Roblee
Precitech,
Inc.
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The impact of temperature
fluctuations on the accuracy of machine tools and metrology
instruments has been recognized for some time. Many studies
have been done over the years, and thermal effects are clearly
the largest source of nonrepeatable error in precision machine
tools and measuring machines. Consequently, Lawrence Livermore
National Laboratory has had numerous programs over the last
forty years to mitigate the effects of temperature. In this
talk, I will review some of the more important developments
at LLNL in precision temperature control. I will discuss the
principles that were used, and illustrate them with some case
studies. Systems have been developed to precisely control the
temperature of large flows of oil, water and compressed gas.
Seperate means were also used to control air showers over individual
machines, but similar principles of temperature control were
used. Different implementations are possible for doing precision
temperature control, but it was found that very high levels
of precision were possible at relatively low cost, if proper
principles were followed. Temperature control systems were essential
to the success of the Large Optics Diamond Turning Machine at
LLNL, and they will be one of the case studies that will be
discussed in detail.. It used 500 l/min of water which was controlled
to +/- 0.0002 degrees C, and it used an air shower with 570
cubic meters per minute flow which was controlled to +/- 0.002
degrees C for days at a time.
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Speaker:
Stephen
Treado
NIST
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Prior to the development of
the plans and specifications for the NIST Advanced Measurement
Laboratory, a full-scale test module was built, tested and evaluated
to assist in the design development and proof-of-concept of
the HVAC and control systems for the high-accuracy temperature
control laboratory spaces. This presentation will discuss the
results of the evaluation and the lessons learned.
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