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Speaker:
Michael
Gendreau
Colin
Gordon and Associates |
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This presentation includes:
- A review of the basic terminology and criteria used in the
acoustical design of advanced technology facilities,
- Discussion of the mechanisms by which acoustic noise can interfere
with instruments, and
- Details of what the building contributes in terms of sources
of noise (internal and external) and protection from those sources.
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Speaker:
Mark
Schattenburg
MIT |
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The Nanoruler is a novel metrology and grating writing/reading
system that is designed to rapidly pattern large gratings with
a pattern distortion approaching 1 nm, some 100X smaller than
current technology. These patterns are intended to be used for
the metrology of nanoelectronic and opto-electronic patterns.
It performs this task by utilizing a technique called scanning
beam interference lithography, invented in our laboratory. This
method is a hybrid of holographic patterning and ruling, combining
the best features of both. The accuracy of the resulting grating
is critically dependant on the accuracy of the high-performance
air bearing stage, and this is limited primarily by the laser
interferometer. The accuracy of the interferometer, in turn,
is overwhelmingly dominated by atmospheric disturbances such
as temperature and pressure fluctuations. For the Nanoruler
we needed an environmental chamber with stringent control of
temperature, pressure, humidity, vibration and acoustics. Working
with a vendor we have completed and are testing a chamber that
we hope will meet our needs. We will report on why these levels
of control are required and preliminary data on chamber performance.
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Speaker:
John
Lawall
NIST
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This presentation discusses the approach of an experimental
physicist to the problem of control of seismic and acoustic
disturbances in a vacuum environment. I will start with a brief
discussion of vibration isolation by means of a passive resonant
system, illustrated with experimental data taken with springs
and elastomers. I will then show the vibration level present
on the floor of a good underground laboratory environment, and
the amount of suppression one achieves with conventional optical
tables. Next, I will show the system we have built at NIST in
order to prototype optical interferometers in a high-vacuum
environment. The environmental isolation mechanisms are activated
sequentially, in order to illustrate the isolation achieved
by each stage and the compromises that some stages entail. This
approach helps to illustrate what fraction of the vibrations
is of acoustic origin and what fraction is seismic, and the
importance of controlling both is made manifest. Disturbances
are measured with both an accelerometer and a high-finesse Fabry-Perot
interferometer. One important conclusion of this work is that
the vibration imposed by a maglev turbomolecular pump is easily
controlled to the extent that it is unlikely to contribute significantly
to the ultimate vibration of even a very quiet system.
It will be shown that our relatively simple system offers vibration
isolation not only vastly surpassing that of a conventional
floating optical table, but in fact better than the ion-pumped
NIST X-ray interferometer.
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Speaker:
Ron
Reifenberger
Purdue
University |
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Scanning Probe Microscopes (SPMs) are essential tools in the
investigation of many nanoscale phenomena. It can be argued
that these microscopes have been instrumental for the rapid
spread of nanotechnology throughout the world. These proximal
probe microscopes have vertical resolutions approaching 0.001
nm and are capable of topographically imaging individual atoms
on clean, flat surfaces. As such, SPMs demand a high degree
of isolation from acoustical building noise and vibration for
proper operation. It is common practice, when using these instruments,
to blame excessive noise on a variety of causes related to the
surrounding environment. We will describe a number of case studies
performed in our laboratory to discern whether noise encountered
in the operation of SPMs are related to building problems or
to shortcomings in the design and construction of the instrument
itself. A number of simple techniques will be discussed that
help to answer this question. We conclude that many simple things
can and will go wrong when using a precise instrument like an
SPM, even though it may be housed in a multi-million dollar
state-of-the-art nano building.
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