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Interactions between Nanomeasurements and Nanobuilding Design

Bob Erdman
   
 
  Speaker:
Bob Erdman
Erdman Measurement Consulting
 
 
The building can limit the Experimenter's ability to make sensitive measurements on nanostructures. A discussion of ways to estimate interference and determine whether shielding is needed and how good the shielding has to be are presented, along with instrument characteristics that impact this determination. Generally, electrostatic ../speakers/shielding must be done at the experiment in any case and the building does not impose a limit to measurement. Magnetic interference is determined by loop area enclosed by current-carrying wire. Building design can be more of a limit in this case. Users and building designers must effectively communicate with each other to understand the limitations of both shielding at the experiment and the building, in order to agree on acceptable levels of interference that will permit nanomeasurements to be made.


(218 KB)
     

EMI/RFI: cause; site analysis; building evaluations; mitigation solutions

Lou Vitale
   
 
  Speaker:
Lou Vitale
Vitatech Engineering
 
 
Electromagnetic interference (EMI) affects various types of laboratory equipment, which are becoming more and more sensitive to extremely low frequency (ELF) and radio frequency (RF) interference. Electron microscopes manufacturers are typically specifying that the ambient AC magnetic fields near the microscope not exceed 1.0 mG.

Conducting a field survey at the proposed site to record ambient electromagnetic fields is essential in understanding the initial site conditions. Meeting with users and surveying their existing laboratories provide significant feedback into the establishment of design criteria for the new laboratory spaces.

With good preplanning, many of the common EMI sources found in a laboratory building can be located away form the laboratory spaces. Where EMI sources are required in or near the lab as part of its basic operation, a mixture of shielding techniques using various construction materials and methods along with actual shielding materials can be provided to maintain the necessary environment. Computer simulations can be preformed to verify proposed laboratory and building configurations.


(6 MB)
     

EMI Issues in a University Microelectronics/Nanotechnology Laboratory

Lou Vitale
   
 
  Speaker:
Tim Miller
Purdue University
 
 
This presentation will present a case study of a laboratory in which stray magnetic fields led to serious performance degradation in an electron beam lithography system, used for high resolution patterning of prototype devices. In this system, proper operation requires an ac magnetic field level below 3 milligauss. The procedures used to determine the source of the interference and how the problem was corrected will be described. The second part of the talk will describe issues related to the design of the Birck Nanotechnology Center. Specifically, we will discuss EMI related design concerns and describe the design approaches that have been adopted in order to minimize EMI effects, both from the building utilities and from other pieces of scientific equipment.

(presentation
not available)
     

Scanning Electron Microscopy in Real-World Environments

Andras Vladar
   
 
  Speaker:
Andras Vladar
NIST
 
 
Electron microscopes are working close to atomic levels and it is expected that they are going to be key imaging and metrology tools in the upcoming nanotechnology. Almost all scanning electron microscopes are limited in their operation by their environment. Usually it is possible to achieve significantly better performance than the specification of these tools by the proper design of their environment and by the use of supplementary compensatory methods. Vibrations transmitted by the building, air (sound) and water and gas supply have obvious detrimental effects to image and measurement quality of these instruments. Low and high frequency electromagnetic fields interfere with the electronics of the microscope and also with the electrons used in the signal generation and detection. This presentation will present detailed specifications and requirements for the environment of SEMs; and will show examples for the various negative effects of the environment, and some possible methods useful to minimize them.


(1.4 MB)
     

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