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Speaker:
Bob
Erdman
Erdman Measurement Consulting
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The building can limit the Experimenter's
ability to make sensitive measurements on nanostructures. A
discussion of ways to estimate interference and determine whether
shielding is needed and how good the shielding has to be are
presented, along with instrument characteristics that impact
this determination. Generally, electrostatic ../speakers/shielding
must be done at the experiment in any case and the building
does not impose a limit to measurement. Magnetic interference
is determined by loop area enclosed by current-carrying wire.
Building design can be more of a limit in this case. Users and
building designers must effectively communicate with each other
to understand the limitations of both shielding at the experiment
and the building, in order to agree on acceptable levels of
interference that will permit nanomeasurements to be made.
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(218
KB)
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Speaker:
Lou
Vitale
Vitatech
Engineering
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Electromagnetic interference (EMI)
affects various types of laboratory equipment, which are becoming
more and more sensitive to extremely low frequency (ELF) and
radio frequency (RF) interference. Electron microscopes manufacturers
are typically specifying that the ambient AC magnetic fields
near the microscope not exceed 1.0 mG.
Conducting a field survey at the proposed
site to record ambient electromagnetic fields is essential
in understanding the initial site conditions. Meeting with
users and surveying their existing laboratories provide significant
feedback into the establishment of design criteria for the
new laboratory spaces.
With good preplanning, many of the common
EMI sources found in a laboratory building can be located
away form the laboratory spaces. Where EMI sources are required
in or near the lab as part of its basic operation, a mixture
of shielding techniques using various construction materials
and methods along with actual shielding materials can be provided
to maintain the necessary environment. Computer simulations
can be preformed to verify proposed laboratory and building
configurations.
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(6
MB)
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Speaker:
Tim
Miller
Purdue
University
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This presentation will present a
case study of a laboratory in which stray magnetic fields led
to serious performance degradation in an electron beam lithography
system, used for high resolution patterning of prototype devices.
In this system, proper operation requires an ac magnetic field
level below 3 milligauss. The procedures used to determine the
source of the interference and how the problem was corrected
will be described. The second part of the talk will describe
issues related to the design of the Birck Nanotechnology Center.
Specifically, we will discuss EMI related design concerns and
describe the design approaches that have been adopted in order
to minimize EMI effects, both from the building utilities and
from other pieces of scientific equipment.
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(presentation
not available)
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Speaker:
Andras
Vladar
NIST
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Electron microscopes are working
close to atomic levels and it is expected that they are going
to be key imaging and metrology tools in the upcoming nanotechnology.
Almost all scanning electron microscopes are limited in their
operation by their environment. Usually it is possible to achieve
significantly better performance than the specification of these
tools by the proper design of their environment and by the use
of supplementary compensatory methods. Vibrations transmitted
by the building, air (sound) and water and gas supply have obvious
detrimental effects to image and measurement quality of these
instruments. Low and high frequency electromagnetic fields interfere
with the electronics of the microscope and also with the electrons
used in the signal generation and detection. This presentation
will present detailed specifications and requirements for the
environment of SEMs; and will show examples for the various
negative effects of the environment, and some possible methods
useful to minimize them.
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(1.4
MB)
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